<?xml version="1.0" encoding="UTF-8"?>
<com.comsol.mph-v12:Model xmi:version="2.0" xmlns:xmi="http://www.omg.org/XMI" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:com.comsol.mph-v12="http://www.comsol.com/mph/v12" tag="savepoint1" entityName="fram_Uday.mph" entityComments="" entityAuthor="" entityCreationTime="1408455590360" entityModifyTime="1409168872491" entityModifiedBy="" multiphysicsEventHandlers="//@material //@physics/@physints[key='solid']/@value" savePoint="true" savedInVersion="231" comsolVersion="COMSOL 4.3 (Build: 151)" baseSystem="SI" srl="1014606">
  <entityFlags>nodeactivate</entityFlags>
  <entityFlags>noremove</entityFlags>
  <param tag="param" entityName="Parameters" entityComments="" entityAuthor="" entityCreationTime="1408455592957">
    <entityFlags>nodeactivate</entityFlags>
    <entityFlags>noremove</entityFlags>
  </param>
  <study entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408455590360" model="/">
    <objects key="std1">
      <value tag="std1" entityName="Study 1" entityComments="" entityAuthor="" entityCreationTime="1408457101620" solvers="//@sol/@solseqs[key='sol1']/@value">
        <tags tag="Analysis" values="1,'std1'" readOnly="true"/>
        <entityFlags>nodeactivate</entityFlags>
        <feature model="/">
          <features key="stat">
            <value xsi:type="com.comsol.mph-v12:StudyFeature" tag="stat" entityName="Stationary" entityComments="" entityAuthor="" entityCreationTime="1408457101632" operationID="Stationary" key="true[]activatesolid|on|activateimagenull|adapgeomgeom1adaptionoffconstraintgroupdisabledphysicsdisabledvariables[]discretizationsolid|physics|geometricNonlinearityoffgeometricNonlinearityActiveongeomselectiongeom1loadcaseloadgrouploadgroupweightmeshgeom1|mesh1|notsolmethodinitnotsolnum1notsolvertypenonenotstudyzerozeronotstudystepnullnott0.0nottimeinterpoffphysselectionsolidplistplistarrplotoffplotgrouppg1pnameprobes[]probeselallshowGeometricNonlinearityonsweeptypesparseuseadvanceddisableoffuseloadcaseoffuseparamoffusesoloff">
              <tags tag="Analysis" values="1,'std1/stat'" readOnly="true"/>
              <properties key="showGeometricNonlinearity">
                <value tag="showGeometricNonlinearity" value="on"/>
              </properties>
              <properties key="geometricNonlinearityActive">
                <value tag="geometricNonlinearityActive" value="on"/>
              </properties>
              <properties key="geometricNonlinearity">
                <value tag="geometricNonlinearity" value="off"/>
              </properties>
              <properties key="plot">
                <value tag="plot" value="off"/>
              </properties>
              <properties key="plotgroup">
                <value tag="plotgroup"/>
              </properties>
              <properties key="probesel">
                <value tag="probesel" value="all"/>
              </properties>
              <properties key="probes">
                <value tag="probes" referenceContainerList="//@probe"/>
              </properties>
              <properties key="physselection">
                <value tag="physselection" reference="//@physics/@physints[key='solid']/@value" referenceContainerList="//@physics"/>
              </properties>
              <properties key="activate">
                <value tag="activate" valueArray="1|2,'solid','on'"/>
              </properties>
              <properties key="discretization">
                <value tag="discretization" valueArray="1|2,'solid','physics'"/>
              </properties>
              <properties key="useadvanceddisable">
                <value tag="useadvanceddisable" value="off"/>
              </properties>
              <properties key="activateimage">
                <value tag="activateimage" valueArray="1|1, "/>
              </properties>
              <properties key="disabledvariables">
                <value tag="disabledvariables" referenceContainerList="//@expr"/>
              </properties>
              <properties key="disabledphysics">
                <value tag="disabledphysics" valueArray="1|0"/>
              </properties>
              <properties key="usesol">
                <value tag="usesol" value="off"/>
              </properties>
              <properties key="notsolmethod">
                <value tag="notsolmethod" value="init"/>
              </properties>
              <properties key="notstudy">
                <value tag="notstudy" value="zero" referenceContainerList="//@study" compositeIndex="0"/>
              </properties>
              <properties key="notstudystep">
                <value tag="notstudystep"/>
              </properties>
              <properties key="notsolvertype">
                <value tag="notsolvertype" value="none"/>
              </properties>
              <properties key="notsolnum">
                <value tag="notsolnum" value="1" compositeIndex="1"/>
              </properties>
              <properties key="nottimeinterp">
                <value tag="nottimeinterp" value="off"/>
              </properties>
              <properties key="nott">
                <value tag="nott" value="0"/>
              </properties>
              <properties key="geomselection">
                <value tag="geomselection" reference="//@geom/@geoms[key='geom1']/@value" referenceContainerList="//@geom"/>
              </properties>
              <properties key="mesh">
                <value tag="mesh" valueArray="1|2,'geom1','mesh1'"/>
              </properties>
              <properties key="useparam">
                <value tag="useparam" value="off"/>
              </properties>
              <properties key="sweeptype">
                <value tag="sweeptype" value="sparse"/>
              </properties>
              <properties key="pname">
                <value tag="pname" valueArray="1|0"/>
              </properties>
              <properties key="plist">
                <value tag="plist" value="" valueArray="1|0"/>
              </properties>
              <properties key="plistarr">
                <value tag="plistarr" valueArray="0"/>
              </properties>
              <properties key="plistarr_vector_method">
                <value tag="plistarr_vector_method" valueArray="1|0"/>
              </properties>
              <properties key="plistarr_vector_start">
                <value tag="plistarr_vector_start" valueArray="1|0"/>
              </properties>
              <properties key="plistarr_vector_stop">
                <value tag="plistarr_vector_stop" valueArray="1|0"/>
              </properties>
              <properties key="plistarr_vector_step">
                <value tag="plistarr_vector_step" valueArray="1|0"/>
              </properties>
              <properties key="plistarr_vector_numvalues">
                <value tag="plistarr_vector_numvalues" valueArray="1|0"/>
              </properties>
              <properties key="plistarr_vector_function">
                <value tag="plistarr_vector_function" valueArray="1|0"/>
              </properties>
              <properties key="useloadcase">
                <value tag="useloadcase" value="off"/>
              </properties>
              <properties key="loadcase">
                <value tag="loadcase" valueArray="1|0"/>
              </properties>
              <properties key="loadgroup">
                <value tag="loadgroup" valueArray="0"/>
              </properties>
              <properties key="loadgroupweight">
                <value tag="loadgroupweight" valueArray="0"/>
              </properties>
              <properties key="constraintgroup">
                <value tag="constraintgroup" valueArray="0"/>
              </properties>
              <properties key="adaption">
                <value tag="adaption" value="off"/>
              </properties>
              <properties key="adapgeom">
                <value tag="adapgeom" reference="//@geom/@geoms[key='geom1']/@value" referenceContainerList="//@geom"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:StudyFeatureList" model="/"/>
              <mglevel model="/"/>
            </value>
          </features>
        </feature>
      </value>
    </objects>
  </study>
  <cpl entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408455590367" model="/"/>
  <frame entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408455590372" model="/">
    <frames key="material1">
      <value tag="material1" coord="3,'X','Y','Z'" geom="//@geom/@geoms[key='geom1']/@value"/>
    </frames>
    <frames key="spatial1">
      <value tag="spatial1" coord="3,'x','y','z'" geom="//@geom/@geoms[key='geom1']/@value" physics="//@physics/@physints[key='solid']/@value">
        <sshape model="/">
          <features key="fixed2">
            <value tag="fixed2" type="moving_expr" sorder="2">
              <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408457101565" selType="geom" geom="//@geom/@geoms[key='geom1']/@value"/>
              <coordexprs>X</coordexprs>
              <coordexprs>Y</coordexprs>
            </value>
          </features>
        </sshape>
      </value>
    </frames>
  </frame>
  <weak entityName="List" entityComments="" entityAuthor="" entityCreationTime="1409162126703" model="/"/>
  <selection entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101650" model="/"/>
  <view entityName="Views" entityComments="" entityAuthor="" entityCreationTime="1408455590992" model="/">
    <views key="view1">
      <value tag="view1" entityName="View 1" entityComments="" entityAuthor="" entityCreationTime="1408457101412" operationID="ModelView2D" geom="//@geom/@geoms[key='geom1']/@value" sdim="2" current="true" globalcurrent="true">
        <entityFlags>nodeactivate</entityFlags>
        <properties key="showlabels">
          <value tag="showlabels" value="off"/>
        </properties>
        <properties key="showDirections">
          <value tag="showDirections" value="off"/>
        </properties>
        <properties key="locked">
          <value tag="locked" value="off"/>
        </properties>
        <properties key="drawhidestatus">
          <value tag="drawhidestatus" value="hide"/>
        </properties>
        <properties key="geomhidestatus">
          <value tag="geomhidestatus" value="hide"/>
        </properties>
        <properties key="isnew">
          <value tag="isnew" value="off"/>
        </properties>
        <properties key="postviewkey">
          <value tag="postviewkey" value=""/>
        </properties>
        <properties key="workplaneclip">
          <value tag="workplaneclip" value="off"/>
        </properties>
        <feature xsi:type="com.comsol.mph-v12:ViewFeatureList" model="/"/>
        <hideObjects entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101416" model="/"/>
        <hideEntities entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101417" model="/"/>
        <axis tag="axis" entityName="Axis" entityComments="" entityAuthor="" entityCreationTime="1408457101766" operationID="Axis2D">
          <entityFlags>noremove</entityFlags>
          <entityFlags>nodeactivate</entityFlags>
          <properties key="xmin">
            <value tag="xmin" value="-478.0997619628906"/>
          </properties>
          <properties key="xmax">
            <value tag="xmax" value="1218.8253173828125"/>
          </properties>
          <properties key="ymin">
            <value tag="ymin" value="-302.9544677734375"/>
          </properties>
          <properties key="ymax">
            <value tag="ymax" value="627.4651489257812"/>
          </properties>
          <properties key="preserveaspect">
            <value tag="preserveaspect" value="on"/>
          </properties>
          <properties key="manualgrid">
            <value tag="manualgrid" value="off"/>
          </properties>
          <properties key="xspacing">
            <value tag="xspacing" value="1"/>
          </properties>
          <properties key="yspacing">
            <value tag="yspacing" value="1"/>
          </properties>
          <properties key="xextra">
            <value tag="xextra" value="" valueArray="1|0"/>
          </properties>
          <properties key="xextra_vector_method">
            <value tag="xextra_vector_method" value="step"/>
          </properties>
          <properties key="xextra_vector_start">
            <value tag="xextra_vector_start" value=""/>
          </properties>
          <properties key="xextra_vector_stop">
            <value tag="xextra_vector_stop" value=""/>
          </properties>
          <properties key="xextra_vector_step">
            <value tag="xextra_vector_step" value=""/>
          </properties>
          <properties key="xextra_vector_numvalues">
            <value tag="xextra_vector_numvalues" value=""/>
          </properties>
          <properties key="xextra_vector_function">
            <value tag="xextra_vector_function" value="none"/>
          </properties>
          <properties key="yextra">
            <value tag="yextra" value="" valueArray="1|0"/>
          </properties>
          <properties key="yextra_vector_method">
            <value tag="yextra_vector_method" value="step"/>
          </properties>
          <properties key="yextra_vector_start">
            <value tag="yextra_vector_start" value=""/>
          </properties>
          <properties key="yextra_vector_stop">
            <value tag="yextra_vector_stop" value=""/>
          </properties>
          <properties key="yextra_vector_step">
            <value tag="yextra_vector_step" value=""/>
          </properties>
          <properties key="yextra_vector_numvalues">
            <value tag="yextra_vector_numvalues" value=""/>
          </properties>
          <properties key="yextra_vector_function">
            <value tag="yextra_vector_function" value="none"/>
          </properties>
          <feature xsi:type="com.comsol.mph-v12:ViewFeatureList" model="/"/>
        </axis>
      </value>
    </views>
  </view>
  <field entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101436" model="/"/>
  <constr entityName="List" entityComments="" entityAuthor="" entityCreationTime="1409162126709" model="/"/>
  <expr entityName="Variables" entityComments="" entityAuthor="" entityCreationTime="1408455590362" model="/"/>
  <func entityName="Functions" entityComments="" entityAuthor="" entityCreationTime="1408455590369" model="/"/>
  <init entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101515" model="/"/>
  <geom entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408455590365" model="/">
    <geoms key="geom1">
      <value tag="geom1" storedParent="//@modelNode/@modelNodes[key='mod1']/@value" entityName="Geometry 1" entityComments="" entityAuthor="" entityCreationTime="1408457101410" assocID="1,0,1845179096,-186225457" angularUnit="deg" current="//@geom/@geoms[key='geom1']/@value/@feature/@features[key='pol8']/@value" externallySet="false" geometryFrame="//@frame/@frames[key='material1']/@value" geomInfo="//@geom/@geoms[key='geom1']/@value/@geomnative" geomrep="comsol" lastBuiltFeature="//@geom/@geoms[key='geom1']/@value/@feature/@features[key='fin']/@value" lengthUnit="m" materialFrame="//@frame/@frames[key='material1']/@value" meshFrame="//@frame/@frames[key='material1']/@value" sdim="2" spatialFrame="//@frame/@frames[key='spatial1']/@value" xmeshIndex="1" sequenceType="STANDARD">
        <entityFlags>nodeactivate</entityFlags>
        <geomnative tag="/geom1.mphbin" numEntities="24,32,9" numEntitiesMesh="24,32,9" spaceDim="2"/>
        <feature model="/" sequence="//@geom/@geoms[key='geom1']/@value">
          <features key="pol1">
            <value xsi:type="com.comsol.mph-v12:GeomFeature" tag="pol1" entityName="TiAlN (layer1)" entityComments="" entityAuthor="" entityCreationTime="1408458886604" operationID="Polygon" key="true[deg]addedrowaddedrowidx-1filenamesegid1|2|4|5|segvtxvalid0.0|0.0|762.0|0.0|736.0|60.0|26.0|60.0|0.0|0.0|sourcetabletable0.0|0.0|762.0|0.0|736.0|60.0|26.0|60.0|typesolidxy" status="built" buildStatus="built" cacheTagImported="-8329013648686563235" cacheTag="-4466103285729792225" id="2" sequence="//@geom/@geoms[key='geom1']/@value">
              <properties key="createselection">
                <value tag="createselection" value="off"/>
              </properties>
              <properties key="type">
                <value tag="type" value="solid"/>
              </properties>
              <properties key="source">
                <value tag="source" value="table"/>
              </properties>
              <properties key="filename">
                <value tag="filename" value=""/>
              </properties>
              <properties key="rebuild">
                <value tag="rebuild"/>
              </properties>
              <properties key="table">
                <value tag="table" valueArray="4|2,'0','0'|2,'762','0'|2,'736','60'|2,'26','60'"/>
              </properties>
              <properties key="x">
                <value tag="x" value="" valueArray="1|0"/>
              </properties>
              <properties key="x_vector_method">
                <value tag="x_vector_method" value="step"/>
              </properties>
              <properties key="x_vector_start">
                <value tag="x_vector_start" value=""/>
              </properties>
              <properties key="x_vector_stop">
                <value tag="x_vector_stop" value=""/>
              </properties>
              <properties key="x_vector_step">
                <value tag="x_vector_step" value=""/>
              </properties>
              <properties key="x_vector_numvalues">
                <value tag="x_vector_numvalues" value=""/>
              </properties>
              <properties key="x_vector_function">
                <value tag="x_vector_function" value="none"/>
              </properties>
              <properties key="y">
                <value tag="y" value="" valueArray="1|0"/>
              </properties>
              <properties key="y_vector_method">
                <value tag="y_vector_method" value="step"/>
              </properties>
              <properties key="y_vector_start">
                <value tag="y_vector_start" value=""/>
              </properties>
              <properties key="y_vector_stop">
                <value tag="y_vector_stop" value=""/>
              </properties>
              <properties key="y_vector_step">
                <value tag="y_vector_step" value=""/>
              </properties>
              <properties key="y_vector_numvalues">
                <value tag="y_vector_numvalues" value=""/>
              </properties>
              <properties key="y_vector_function">
                <value tag="y_vector_function" value="none"/>
              </properties>
              <properties key="segid">
                <value tag="segid" valueArray="1|4,'1','2','4','5'"/>
              </properties>
              <properties key="segvtxvalid">
                <value tag="segvtxvalid" valueArray="5|2,'0','0'|2,'762','0'|2,'736','60'|2,'26','60'|2,'0','0'"/>
              </properties>
              <properties key="addedrowidx">
                <value tag="addedrowidx" value="-1"/>
              </properties>
              <properties key="addedrow">
                <value tag="addedrow" valueArray="1|0"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:GeomFeatureList" model="/" sequence="//@geom/@geoms[key='geom1']/@value"/>
              <geom model="/">
                <objects key="pol1(1)">
                  <value tag="pol1(1)" entityName="Polygon" entityComments="" entityAuthor="" entityCreationTime="1408465212832" assocID="2,0,-1039845703,1541336863">
                    <entityFlags>norename</entityFlags>
                    <geomnative tag="/geom2.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
                  </value>
                </objects>
              </geom>
              <importedGeom tag="part0" entityName="" entityComments="" entityAuthor="" entityCreationTime="1408465212830">
                <entityFlags>norename</entityFlags>
                <geomnative tag="/geom2.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
              </importedGeom>
            </value>
          </features>
          <features key="pol2">
            <value xsi:type="com.comsol.mph-v12:GeomFeature" tag="pol2" entityName="Ir (layer2)" entityComments="" entityAuthor="" entityCreationTime="1408465220491" operationID="Polygon" key="true[deg]addedrowaddedrowidx-1filenamesegid1|2|4|5|segvtxvalid26.0|60.0|736.0|60.0|707.0|140.0|55.0|140.0|26.0|60.0|sourcetabletable26.0|60.0|736.0|60.0|707.0|140.0|55.0|140.0|typesolidx26.0|y" status="built" buildStatus="built" cacheTagImported="5900172321701083091" cacheTag="-8757244807155579917" id="3" sequence="//@geom/@geoms[key='geom1']/@value">
              <properties key="createselection">
                <value tag="createselection" value="off"/>
              </properties>
              <properties key="type">
                <value tag="type" value="solid"/>
              </properties>
              <properties key="source">
                <value tag="source" value="table"/>
              </properties>
              <properties key="filename">
                <value tag="filename" value=""/>
              </properties>
              <properties key="rebuild">
                <value tag="rebuild"/>
              </properties>
              <properties key="table">
                <value tag="table" valueArray="4|2,'26','60'|2,'736','60'|2,'707','140'|2,'55','140'"/>
              </properties>
              <properties key="x">
                <value tag="x" value="26" valueArray="1|1,'26'"/>
              </properties>
              <properties key="x_vector_method">
                <value tag="x_vector_method" value="step"/>
              </properties>
              <properties key="x_vector_start">
                <value tag="x_vector_start" value=""/>
              </properties>
              <properties key="x_vector_stop">
                <value tag="x_vector_stop" value=""/>
              </properties>
              <properties key="x_vector_step">
                <value tag="x_vector_step" value=""/>
              </properties>
              <properties key="x_vector_numvalues">
                <value tag="x_vector_numvalues" value=""/>
              </properties>
              <properties key="x_vector_function">
                <value tag="x_vector_function" value="none"/>
              </properties>
              <properties key="y">
                <value tag="y" value="" valueArray="1|0"/>
              </properties>
              <properties key="y_vector_method">
                <value tag="y_vector_method" value="step"/>
              </properties>
              <properties key="y_vector_start">
                <value tag="y_vector_start" value=""/>
              </properties>
              <properties key="y_vector_stop">
                <value tag="y_vector_stop" value=""/>
              </properties>
              <properties key="y_vector_step">
                <value tag="y_vector_step" value=""/>
              </properties>
              <properties key="y_vector_numvalues">
                <value tag="y_vector_numvalues" value=""/>
              </properties>
              <properties key="y_vector_function">
                <value tag="y_vector_function" value="none"/>
              </properties>
              <properties key="segid">
                <value tag="segid" valueArray="1|4,'1','2','4','5'"/>
              </properties>
              <properties key="segvtxvalid">
                <value tag="segvtxvalid" valueArray="5|2,'26','60'|2,'736','60'|2,'707','140'|2,'55','140'|2,'26','60'"/>
              </properties>
              <properties key="addedrowidx">
                <value tag="addedrowidx" value="-1"/>
              </properties>
              <properties key="addedrow">
                <value tag="addedrow" valueArray="1|0"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:GeomFeatureList" model="/" sequence="//@geom/@geoms[key='geom1']/@value"/>
              <geom model="/">
                <objects key="pol2(1)">
                  <value tag="pol2(1)" entityName="Polygon" entityComments="" entityAuthor="" entityCreationTime="1408465337973" assocID="3,0,-2038954946,-363101197">
                    <entityFlags>norename</entityFlags>
                    <geomnative tag="/geom3.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
                  </value>
                </objects>
              </geom>
              <importedGeom tag="part0" entityName="" entityComments="" entityAuthor="" entityCreationTime="1408465726207">
                <entityFlags>norename</entityFlags>
                <geomnative tag="/geom3.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
              </importedGeom>
            </value>
          </features>
          <features key="pol3">
            <value xsi:type="com.comsol.mph-v12:GeomFeature" tag="pol3" entityName="PZT (layer3)" entityComments="" entityAuthor="" entityCreationTime="1408465391513" operationID="Polygon" key="true[deg]addedrowaddedrowidx-1filenamesegid1|2|4|5|segvtxvalid55.0|140.0|707.0|140.0|672.0|210.0|90.0|210.0|55.0|140.0|sourcetabletable55.0|140.0|707.0|140.0|672.0|210.0|90.0|210.0|typesolidxy" status="built" buildStatus="built" cacheTagImported="-6888331858425918485" cacheTag="-2893276179077368136" id="4" sequence="//@geom/@geoms[key='geom1']/@value">
              <properties key="createselection">
                <value tag="createselection" value="off"/>
              </properties>
              <properties key="type">
                <value tag="type" value="solid"/>
              </properties>
              <properties key="source">
                <value tag="source" value="table"/>
              </properties>
              <properties key="filename">
                <value tag="filename" value=""/>
              </properties>
              <properties key="rebuild">
                <value tag="rebuild"/>
              </properties>
              <properties key="table">
                <value tag="table" valueArray="4|2,'55','140'|2,'707','140'|2,'672','210'|2,'90','210'"/>
              </properties>
              <properties key="x">
                <value tag="x" value="" valueArray="1|0"/>
              </properties>
              <properties key="x_vector_method">
                <value tag="x_vector_method" value="step"/>
              </properties>
              <properties key="x_vector_start">
                <value tag="x_vector_start" value=""/>
              </properties>
              <properties key="x_vector_stop">
                <value tag="x_vector_stop" value=""/>
              </properties>
              <properties key="x_vector_step">
                <value tag="x_vector_step" value=""/>
              </properties>
              <properties key="x_vector_numvalues">
                <value tag="x_vector_numvalues" value=""/>
              </properties>
              <properties key="x_vector_function">
                <value tag="x_vector_function" value="none"/>
              </properties>
              <properties key="y">
                <value tag="y" value="" valueArray="1|0"/>
              </properties>
              <properties key="y_vector_method">
                <value tag="y_vector_method" value="step"/>
              </properties>
              <properties key="y_vector_start">
                <value tag="y_vector_start" value=""/>
              </properties>
              <properties key="y_vector_stop">
                <value tag="y_vector_stop" value=""/>
              </properties>
              <properties key="y_vector_step">
                <value tag="y_vector_step" value=""/>
              </properties>
              <properties key="y_vector_numvalues">
                <value tag="y_vector_numvalues" value=""/>
              </properties>
              <properties key="y_vector_function">
                <value tag="y_vector_function" value="none"/>
              </properties>
              <properties key="segid">
                <value tag="segid" valueArray="1|4,'1','2','4','5'"/>
              </properties>
              <properties key="segvtxvalid">
                <value tag="segvtxvalid" valueArray="5|2,'55','140'|2,'707','140'|2,'672','210'|2,'90','210'|2,'55','140'"/>
              </properties>
              <properties key="addedrowidx">
                <value tag="addedrowidx" value="-1"/>
              </properties>
              <properties key="addedrow">
                <value tag="addedrow" valueArray="1|0"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:GeomFeatureList" model="/" sequence="//@geom/@geoms[key='geom1']/@value"/>
              <geom model="/">
                <objects key="pol3(1)">
                  <value tag="pol3(1)" entityName="Polygon" entityComments="" entityAuthor="" entityCreationTime="1408465597026" assocID="4,0,-673643356,-184650056">
                    <entityFlags>norename</entityFlags>
                    <geomnative tag="/geom4.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
                  </value>
                </objects>
              </geom>
              <importedGeom tag="part0" entityName="" entityComments="" entityAuthor="" entityCreationTime="1408465597026">
                <entityFlags>norename</entityFlags>
                <geomnative tag="/geom4.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
              </importedGeom>
            </value>
          </features>
          <features key="pol4">
            <value xsi:type="com.comsol.mph-v12:GeomFeature" tag="pol4" entityName="Ir (layer4)" entityComments="" entityAuthor="" entityCreationTime="1408465732630" operationID="Polygon" key="true[deg]addedrowaddedrowidx-1filenamesegid1|2|4|5|segvtxvalid90.0|210.0|672.0|210.0|653.0|252.0|109.0|252.0|90.0|210.0|sourcetabletable90.0|210.0|672.0|210.0|653.0|252.0|109.0|252.0|typesolidxy" status="built" buildStatus="built" cacheTagImported="-1101406604366407209" cacheTag="-5352931127203662979" id="5" sequence="//@geom/@geoms[key='geom1']/@value">
              <properties key="createselection">
                <value tag="createselection" value="off"/>
              </properties>
              <properties key="type">
                <value tag="type" value="solid"/>
              </properties>
              <properties key="source">
                <value tag="source" value="table"/>
              </properties>
              <properties key="filename">
                <value tag="filename" value=""/>
              </properties>
              <properties key="rebuild">
                <value tag="rebuild"/>
              </properties>
              <properties key="table">
                <value tag="table" valueArray="4|2,'90','210'|2,'672','210'|2,'653','252'|2,'109','252'"/>
              </properties>
              <properties key="x">
                <value tag="x" value="" valueArray="1|0"/>
              </properties>
              <properties key="x_vector_method">
                <value tag="x_vector_method" value="step"/>
              </properties>
              <properties key="x_vector_start">
                <value tag="x_vector_start" value=""/>
              </properties>
              <properties key="x_vector_stop">
                <value tag="x_vector_stop" value=""/>
              </properties>
              <properties key="x_vector_step">
                <value tag="x_vector_step" value=""/>
              </properties>
              <properties key="x_vector_numvalues">
                <value tag="x_vector_numvalues" value=""/>
              </properties>
              <properties key="x_vector_function">
                <value tag="x_vector_function" value="none"/>
              </properties>
              <properties key="y">
                <value tag="y" value="" valueArray="1|0"/>
              </properties>
              <properties key="y_vector_method">
                <value tag="y_vector_method" value="step"/>
              </properties>
              <properties key="y_vector_start">
                <value tag="y_vector_start" value=""/>
              </properties>
              <properties key="y_vector_stop">
                <value tag="y_vector_stop" value=""/>
              </properties>
              <properties key="y_vector_step">
                <value tag="y_vector_step" value=""/>
              </properties>
              <properties key="y_vector_numvalues">
                <value tag="y_vector_numvalues" value=""/>
              </properties>
              <properties key="y_vector_function">
                <value tag="y_vector_function" value="none"/>
              </properties>
              <properties key="segid">
                <value tag="segid" valueArray="1|4,'1','2','4','5'"/>
              </properties>
              <properties key="segvtxvalid">
                <value tag="segvtxvalid" valueArray="5|2,'90','210'|2,'672','210'|2,'653','252'|2,'109','252'|2,'90','210'"/>
              </properties>
              <properties key="addedrowidx">
                <value tag="addedrowidx" value="-1"/>
              </properties>
              <properties key="addedrow">
                <value tag="addedrow" valueArray="1|0"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:GeomFeatureList" model="/" sequence="//@geom/@geoms[key='geom1']/@value"/>
              <geom model="/">
                <objects key="pol4(1)">
                  <value tag="pol4(1)" entityName="Polygon" entityComments="" entityAuthor="" entityCreationTime="1408465883233" assocID="5,0,-1246326400,937751421">
                    <entityFlags>norename</entityFlags>
                    <geomnative tag="/geom5.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
                  </value>
                </objects>
              </geom>
              <importedGeom tag="part0" entityName="" entityComments="" entityAuthor="" entityCreationTime="1408465973782">
                <entityFlags>norename</entityFlags>
                <geomnative tag="/geom5.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
              </importedGeom>
            </value>
          </features>
          <features key="pol5">
            <value xsi:type="com.comsol.mph-v12:GeomFeature" tag="pol5" entityName="TiAlN (layer5)" entityComments="" entityAuthor="" entityCreationTime="1408465997284" operationID="Polygon" key="true[deg]addedrowaddedrowidx-1filenamesegid1|2|4|5|segvtxvalid109.0|252.0|653.0|252.0|533.0|345.0|229.0|345.0|109.0|252.0|sourcetabletable109.0|252.0|653.0|252.0|533.0|345.0|229.0|345.0|typesolidx109.0|y" status="built" buildStatus="built" cacheTagImported="-2408026867410650761" cacheTag="870628030457363102" id="6" sequence="//@geom/@geoms[key='geom1']/@value">
              <properties key="createselection">
                <value tag="createselection" value="off"/>
              </properties>
              <properties key="type">
                <value tag="type" value="solid"/>
              </properties>
              <properties key="source">
                <value tag="source" value="table"/>
              </properties>
              <properties key="filename">
                <value tag="filename" value=""/>
              </properties>
              <properties key="rebuild">
                <value tag="rebuild"/>
              </properties>
              <properties key="table">
                <value tag="table" valueArray="4|2,'109','252'|2,'653','252'|2,'533','345'|2,'229','345'"/>
              </properties>
              <properties key="x">
                <value tag="x" value="109" valueArray="1|1,'109'"/>
              </properties>
              <properties key="x_vector_method">
                <value tag="x_vector_method" value="step"/>
              </properties>
              <properties key="x_vector_start">
                <value tag="x_vector_start" value=""/>
              </properties>
              <properties key="x_vector_stop">
                <value tag="x_vector_stop" value=""/>
              </properties>
              <properties key="x_vector_step">
                <value tag="x_vector_step" value=""/>
              </properties>
              <properties key="x_vector_numvalues">
                <value tag="x_vector_numvalues" value=""/>
              </properties>
              <properties key="x_vector_function">
                <value tag="x_vector_function" value="none"/>
              </properties>
              <properties key="y">
                <value tag="y" value="" valueArray="1|0"/>
              </properties>
              <properties key="y_vector_method">
                <value tag="y_vector_method" value="step"/>
              </properties>
              <properties key="y_vector_start">
                <value tag="y_vector_start" value=""/>
              </properties>
              <properties key="y_vector_stop">
                <value tag="y_vector_stop" value=""/>
              </properties>
              <properties key="y_vector_step">
                <value tag="y_vector_step" value=""/>
              </properties>
              <properties key="y_vector_numvalues">
                <value tag="y_vector_numvalues" value=""/>
              </properties>
              <properties key="y_vector_function">
                <value tag="y_vector_function" value="none"/>
              </properties>
              <properties key="segid">
                <value tag="segid" valueArray="1|4,'1','2','4','5'"/>
              </properties>
              <properties key="segvtxvalid">
                <value tag="segvtxvalid" valueArray="5|2,'109','252'|2,'653','252'|2,'533','345'|2,'229','345'|2,'109','252'"/>
              </properties>
              <properties key="addedrowidx">
                <value tag="addedrowidx" value="-1"/>
              </properties>
              <properties key="addedrow">
                <value tag="addedrow" valueArray="1|0"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:GeomFeatureList" model="/" sequence="//@geom/@geoms[key='geom1']/@value"/>
              <geom model="/">
                <objects key="pol5(1)">
                  <value tag="pol5(1)" entityName="Polygon" entityComments="" entityAuthor="" entityCreationTime="1408466191405" assocID="6,0,202708884,-1226261858">
                    <entityFlags>norename</entityFlags>
                    <geomnative tag="/geom6.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
                  </value>
                </objects>
              </geom>
              <importedGeom tag="part0" entityName="" entityComments="" entityAuthor="" entityCreationTime="1408466191404">
                <entityFlags>norename</entityFlags>
                <geomnative tag="/geom6.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
              </importedGeom>
            </value>
          </features>
          <features key="pol6">
            <value xsi:type="com.comsol.mph-v12:GeomFeature" tag="pol6" entityName="W (top contact)" entityComments="" entityAuthor="" entityCreationTime="1408466349170" operationID="Polygon" key="true[deg]addedrowaddedrowidx-1filenamesegid1|2|4|5|segvtxvalid325.0|345.0|495.0|345.0|495.0|515.0|325.0|515.0|325.0|345.0|sourcetabletable325.0|345.0|495.0|345.0|495.0|515.0|325.0|515.0|typesolidxy" status="built" buildStatus="built" cacheTagImported="-8096981063084476295" cacheTag="-7234826157983518295" id="7" sequence="//@geom/@geoms[key='geom1']/@value">
              <properties key="createselection">
                <value tag="createselection" value="off"/>
              </properties>
              <properties key="type">
                <value tag="type" value="solid"/>
              </properties>
              <properties key="source">
                <value tag="source" value="table"/>
              </properties>
              <properties key="filename">
                <value tag="filename" value=""/>
              </properties>
              <properties key="rebuild">
                <value tag="rebuild"/>
              </properties>
              <properties key="table">
                <value tag="table" valueArray="4|2,'325','345'|2,'495','345'|2,'495','515'|2,'325','515'"/>
              </properties>
              <properties key="x">
                <value tag="x" value="" valueArray="1|0"/>
              </properties>
              <properties key="x_vector_method">
                <value tag="x_vector_method" value="step"/>
              </properties>
              <properties key="x_vector_start">
                <value tag="x_vector_start" value=""/>
              </properties>
              <properties key="x_vector_stop">
                <value tag="x_vector_stop" value=""/>
              </properties>
              <properties key="x_vector_step">
                <value tag="x_vector_step" value=""/>
              </properties>
              <properties key="x_vector_numvalues">
                <value tag="x_vector_numvalues" value=""/>
              </properties>
              <properties key="x_vector_function">
                <value tag="x_vector_function" value="none"/>
              </properties>
              <properties key="y">
                <value tag="y" value="" valueArray="1|0"/>
              </properties>
              <properties key="y_vector_method">
                <value tag="y_vector_method" value="step"/>
              </properties>
              <properties key="y_vector_start">
                <value tag="y_vector_start" value=""/>
              </properties>
              <properties key="y_vector_stop">
                <value tag="y_vector_stop" value=""/>
              </properties>
              <properties key="y_vector_step">
                <value tag="y_vector_step" value=""/>
              </properties>
              <properties key="y_vector_numvalues">
                <value tag="y_vector_numvalues" value=""/>
              </properties>
              <properties key="y_vector_function">
                <value tag="y_vector_function" value="none"/>
              </properties>
              <properties key="segid">
                <value tag="segid" valueArray="1|4,'1','2','4','5'"/>
              </properties>
              <properties key="segvtxvalid">
                <value tag="segvtxvalid" valueArray="5|2,'325','345'|2,'495','345'|2,'495','515'|2,'325','515'|2,'325','345'"/>
              </properties>
              <properties key="addedrowidx">
                <value tag="addedrowidx" value="-1"/>
              </properties>
              <properties key="addedrow">
                <value tag="addedrow" valueArray="1|0"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:GeomFeatureList" model="/" sequence="//@geom/@geoms[key='geom1']/@value"/>
              <geom model="/">
                <objects key="pol6(1)">
                  <value tag="pol6(1)" entityName="Polygon" entityComments="" entityAuthor="" entityCreationTime="1408466503137" assocID="7,0,-1684489232,-374328919">
                    <entityFlags>norename</entityFlags>
                    <geomnative tag="/geom7.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
                  </value>
                </objects>
              </geom>
              <importedGeom tag="part0" entityName="" entityComments="" entityAuthor="" entityCreationTime="1408466503136">
                <entityFlags>norename</entityFlags>
                <geomnative tag="/geom7.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
              </importedGeom>
            </value>
          </features>
          <features key="pol7">
            <value xsi:type="com.comsol.mph-v12:GeomFeature" tag="pol7" entityName="W (bottom contact)" entityComments="" entityAuthor="" entityCreationTime="1408466571441" operationID="Polygon" key="true[deg]addedrowaddedrowidx-1filenamesegid1|2|4|5|segvtxvalid93.0|0.0|314.0|0.0|314.0|-221.0|93.0|-221.0|93.0|0.0|sourcetabletable93.0|0.0|314.0|0.0|314.0|-221.0|93.0|-221.0|typesolidxy" status="built" buildStatus="built" cacheTagImported="6467697292337870365" cacheTag="8048333524424820165" id="8" sequence="//@geom/@geoms[key='geom1']/@value">
              <properties key="createselection">
                <value tag="createselection" value="off"/>
              </properties>
              <properties key="type">
                <value tag="type" value="solid"/>
              </properties>
              <properties key="source">
                <value tag="source" value="table"/>
              </properties>
              <properties key="filename">
                <value tag="filename" value=""/>
              </properties>
              <properties key="rebuild">
                <value tag="rebuild"/>
              </properties>
              <properties key="table">
                <value tag="table" valueArray="4|2,'93','0'|2,'314','0'|2,'314','-221'|2,'93','-221'"/>
              </properties>
              <properties key="x">
                <value tag="x" value="" valueArray="1|0"/>
              </properties>
              <properties key="x_vector_method">
                <value tag="x_vector_method" value="step"/>
              </properties>
              <properties key="x_vector_start">
                <value tag="x_vector_start" value=""/>
              </properties>
              <properties key="x_vector_stop">
                <value tag="x_vector_stop" value=""/>
              </properties>
              <properties key="x_vector_step">
                <value tag="x_vector_step" value=""/>
              </properties>
              <properties key="x_vector_numvalues">
                <value tag="x_vector_numvalues" value=""/>
              </properties>
              <properties key="x_vector_function">
                <value tag="x_vector_function" value="none"/>
              </properties>
              <properties key="y">
                <value tag="y" value="" valueArray="1|0"/>
              </properties>
              <properties key="y_vector_method">
                <value tag="y_vector_method" value="step"/>
              </properties>
              <properties key="y_vector_start">
                <value tag="y_vector_start" value=""/>
              </properties>
              <properties key="y_vector_stop">
                <value tag="y_vector_stop" value=""/>
              </properties>
              <properties key="y_vector_step">
                <value tag="y_vector_step" value=""/>
              </properties>
              <properties key="y_vector_numvalues">
                <value tag="y_vector_numvalues" value=""/>
              </properties>
              <properties key="y_vector_function">
                <value tag="y_vector_function" value="none"/>
              </properties>
              <properties key="segid">
                <value tag="segid" valueArray="1|4,'1','2','4','5'"/>
              </properties>
              <properties key="segvtxvalid">
                <value tag="segvtxvalid" valueArray="5|2,'93','0'|2,'314','0'|2,'314','-221'|2,'93','-221'|2,'93','0'"/>
              </properties>
              <properties key="addedrowidx">
                <value tag="addedrowidx" value="-1"/>
              </properties>
              <properties key="addedrow">
                <value tag="addedrow" valueArray="1|0"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:GeomFeatureList" model="/" sequence="//@geom/@geoms[key='geom1']/@value"/>
              <geom model="/">
                <objects key="pol7(1)">
                  <value tag="pol7(1)" entityName="Polygon" entityComments="" entityAuthor="" entityCreationTime="1408466760144" assocID="8,0,1873898674,-717912635">
                    <entityFlags>norename</entityFlags>
                    <geomnative tag="/geom8.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
                  </value>
                </objects>
              </geom>
              <importedGeom tag="part0" entityName="" entityComments="" entityAuthor="" entityCreationTime="1408466760143">
                <entityFlags>norename</entityFlags>
                <geomnative tag="/geom8.mphbin" numEntities="4,4,1" numEntitiesMesh="4,4,1" spaceDim="2"/>
              </importedGeom>
            </value>
          </features>
          <features key="pol8">
            <value xsi:type="com.comsol.mph-v12:GeomFeature" tag="pol8" entityName="polysilicon bulk" entityComments="" entityAuthor="" entityCreationTime="1408470958875" operationID="Polygon" key="true[deg]addedrowaddedrowidx-1filenamesegid1|2|4|6|8|a|c|e|g|i|k|m|o|q|s|u|w|y|10|12|14|16|18|19|segvtxvalid0.0|0.0|93.0|0.0|93.0|-221.0|-100.0|-221.0|-100.0|515.0|862.0|515.0|862.0|-221.0|314.0|-221.0|314.0|0.0|762.0|0.0|736.0|60.0|707.0|140.0|672.0|210.0|653.0|252.0|533.0|345.0|495.0|345.0|495.0|515.0|325.0|515.0|325.0|345.0|229.0|345.0|109.0|252.0|90.0|210.0|55.0|140.0|26.0|60.0|0.0|0.0|sourcetabletable0.0|0.0|93.0|0.0|93.0|-221.0|-100.0|-221.0|-100.0|515.0|862.0|515.0|862.0|-221.0|314.0|-221.0|314.0|0.0|762.0|0.0|736.0|60.0|707.0|140.0|672.0|210.0|653.0|252.0|533.0|345.0|495.0|345.0|495.0|515.0|325.0|515.0|325.0|345.0|229.0|345.0|109.0|252.0|90.0|210.0|55.0|140.0|26.0|60.0|typesolidxy" status="built" buildStatus="built" cacheTagImported="9012156225271927322" cacheTag="7805989622465413423" id="9" sequence="//@geom/@geoms[key='geom1']/@value">
              <properties key="createselection">
                <value tag="createselection" value="off"/>
              </properties>
              <properties key="type">
                <value tag="type" value="solid"/>
              </properties>
              <properties key="source">
                <value tag="source" value="table"/>
              </properties>
              <properties key="filename">
                <value tag="filename" value=""/>
              </properties>
              <properties key="rebuild">
                <value tag="rebuild"/>
              </properties>
              <properties key="table">
                <value tag="table" valueArray="24|2,'0','0'|2,'93','0'|2,'93','-221'|2,'-100','-221'|2,'-100','515'|2,'862','515'|2,'862','-221'|2,'314','-221'|2,'314','0'|2,'762','0'|2,'736','60'|2,'707','140'|2,'672','210'|2,'653','252'|2,'533','345'|2,'495','345'|2,'495','515'|2,'325','515'|2,'325','345'|2,'229','345'|2,'109','252'|2,'90','210'|2,'55','140'|2,'26','60'"/>
              </properties>
              <properties key="x">
                <value tag="x" value="" valueArray="1|0"/>
              </properties>
              <properties key="x_vector_method">
                <value tag="x_vector_method" value="step"/>
              </properties>
              <properties key="x_vector_start">
                <value tag="x_vector_start" value=""/>
              </properties>
              <properties key="x_vector_stop">
                <value tag="x_vector_stop" value=""/>
              </properties>
              <properties key="x_vector_step">
                <value tag="x_vector_step" value=""/>
              </properties>
              <properties key="x_vector_numvalues">
                <value tag="x_vector_numvalues" value=""/>
              </properties>
              <properties key="x_vector_function">
                <value tag="x_vector_function" value="none"/>
              </properties>
              <properties key="y">
                <value tag="y" value="" valueArray="1|0"/>
              </properties>
              <properties key="y_vector_method">
                <value tag="y_vector_method" value="step"/>
              </properties>
              <properties key="y_vector_start">
                <value tag="y_vector_start" value=""/>
              </properties>
              <properties key="y_vector_stop">
                <value tag="y_vector_stop" value=""/>
              </properties>
              <properties key="y_vector_step">
                <value tag="y_vector_step" value=""/>
              </properties>
              <properties key="y_vector_numvalues">
                <value tag="y_vector_numvalues" value=""/>
              </properties>
              <properties key="y_vector_function">
                <value tag="y_vector_function" value="none"/>
              </properties>
              <properties key="segid">
                <value tag="segid" valueArray="1|24,'1','2','4','6','8','10','12','14','16','18','20','22','24','26','28','30','32','34','36','38','40','42','44','45'"/>
              </properties>
              <properties key="segvtxvalid">
                <value tag="segvtxvalid" valueArray="25|2,'0','0'|2,'93','0'|2,'93','-221'|2,'-100','-221'|2,'-100','515'|2,'862','515'|2,'862','-221'|2,'314','-221'|2,'314','0'|2,'762','0'|2,'736','60'|2,'707','140'|2,'672','210'|2,'653','252'|2,'533','345'|2,'495','345'|2,'495','515'|2,'325','515'|2,'325','345'|2,'229','345'|2,'109','252'|2,'90','210'|2,'55','140'|2,'26','60'|2,'0','0'"/>
              </properties>
              <properties key="addedrowidx">
                <value tag="addedrowidx" value="-1"/>
              </properties>
              <properties key="addedrow">
                <value tag="addedrow" valueArray="1|0"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:GeomFeatureList" model="/" sequence="//@geom/@geoms[key='geom1']/@value"/>
              <geom model="/">
                <objects key="pol8(1)">
                  <value tag="pol8(1)" entityName="Polygon" entityComments="" entityAuthor="" entityCreationTime="1408471108484" assocID="9,0,1817473588,661635375">
                    <entityFlags>norename</entityFlags>
                    <geomnative tag="/geom9.mphbin" numEntities="24,24,2" numEntitiesMesh="24,24,2" spaceDim="2"/>
                  </value>
                </objects>
              </geom>
              <importedGeom tag="part0" entityName="" entityComments="" entityAuthor="" entityCreationTime="1408471235271">
                <entityFlags>norename</entityFlags>
                <geomnative tag="/geom9.mphbin" numEntities="24,24,2" numEntitiesMesh="24,24,2" spaceDim="2"/>
              </importedGeom>
            </value>
          </features>
          <features key="fin">
            <value xsi:type="com.comsol.mph-v12:GeomFeature" tag="fin" entityName="Form Union" entityComments="" entityAuthor="" entityCreationTime="1408457101411" operationID="Finalize" key="true[deg]actionunioncreatepairsongeomrepcomsolimprintoffpairtypeidentityrepairtol1.0E-6" status="built" buildStatus="built" cacheTag="7924983876691586255" id="1" sequence="//@geom/@geoms[key='geom1']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <entityFlags>norename</entityFlags>
              <properties key="action">
                <value tag="action" value="union"/>
              </properties>
              <properties key="imprint">
                <value tag="imprint" value="off"/>
              </properties>
              <properties key="createpairs">
                <value tag="createpairs" value="on"/>
              </properties>
              <properties key="pairtype">
                <value tag="pairtype" value="identity"/>
              </properties>
              <properties key="repairtol">
                <value tag="repairtol" value="1.0E-6"/>
              </properties>
              <properties key="geomrep">
                <value tag="geomrep" value="comsol"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:GeomFeatureList" model="/" sequence="//@geom/@geoms[key='geom1']/@value"/>
              <geom model="/">
                <objects key="fin(1)">
                  <value tag="fin(1)" entityName="Finalize" entityComments="" entityAuthor="" entityCreationTime="1408471655180" assocID="1,0,1845179096,-186225457">
                    <entityFlags>norename</entityFlags>
                    <geomnative tag="/geom1.mphbin" numEntities="24,32,9" numEntitiesMesh="24,32,9" spaceDim="2"/>
                  </value>
                </objects>
              </geom>
            </value>
          </features>
        </feature>
      </value>
    </geoms>
  </geom>
  <mesh entityName="Meshes" entityComments="" entityAuthor="" entityCreationTime="1408455590368" model="/">
    <meshes key="mesh1">
      <value tag="mesh1" entityName="Mesh 1" entityComments="" entityAuthor="" entityCreationTime="1408457101427" cacheTagCurrent="-7144725744795385115" currentFeature="//@mesh/@meshes[key='mesh1']/@value/@feature/@features[key='ftri1']/@value" geom="//@geom/@geoms[key='geom1']/@value" lastBuiltFeature="//@mesh/@meshes[key='mesh1']/@value/@feature/@features[key='ftri1']/@value" toolsSize="1.0" type="AUTOMATIC" autogenerated="true" constructionEntitiesToKeep="{},{},{}">
        <entityFlags>nodeactivate</entityFlags>
        <importAssoc tag="/meshassoc34.mphbin"/>
        <feature model="/" sequence="//@mesh/@meshes[key='mesh1']/@value">
          <features key="size">
            <value xsi:type="com.comsol.mph-v12:MeshFeature" tag="size" entityName="Size" entityComments="" entityAuthor="" entityCreationTime="1408471655314" operationID="MeshSizeDefault" key="true[deg]hcurve0.2hgrad1.1hmax9.62hmin0.0192hnarrow1.0tabledefault" status="built" buildStatus="built" sequence="//@mesh/@meshes[key='mesh1']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <entityFlags>norename</entityFlags>
              <properties key="table">
                <value tag="table" value="default"/>
              </properties>
              <properties key="hmax">
                <value tag="hmax" value="9.62"/>
              </properties>
              <properties key="hmin">
                <value tag="hmin" value="0.0192"/>
              </properties>
              <properties key="hcurve">
                <value tag="hcurve" value="0.2"/>
              </properties>
              <properties key="hnarrow">
                <value tag="hnarrow" value="1"/>
              </properties>
              <properties key="hgrad">
                <value tag="hgrad" value="1.1"/>
              </properties>
              <properties key="hauto">
                <value tag="hauto" value="1"/>
              </properties>
              <properties key="custom">
                <value tag="custom" value="off"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:MeshFeatureList" model="/" sequence="//@mesh/@meshes[key='mesh1']/@value"/>
            </value>
          </features>
          <features key="ftri1">
            <value xsi:type="com.comsol.mph-v12:MeshFeature" tag="ftri1" entityName="Free Triangular 1" entityComments="" entityAuthor="" entityCreationTime="1409241697714" operationID="FreeTri" key="true[deg]continueonmethodautosmoothcontrolonsmoothmaxdepth8smoothmaxiter8xscale1.0yscale1.0meshremaining" status="built" buildStatus="built" sequence="//@mesh/@meshes[key='mesh1']/@value">
              <selection xsi:type="com.comsol.mph-v12:MeshSelection" entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1409241697714" selType="meshremaining"/>
              <properties key="continue">
                <value tag="continue" value="on"/>
              </properties>
              <properties key="xscale">
                <value tag="xscale" value="1"/>
              </properties>
              <properties key="yscale">
                <value tag="yscale" value="1"/>
              </properties>
              <properties key="smoothcontrol">
                <value tag="smoothcontrol" value="on"/>
              </properties>
              <properties key="smoothmaxiter">
                <value tag="smoothmaxiter" value="8"/>
              </properties>
              <properties key="smoothmaxdepth">
                <value tag="smoothmaxdepth" value="8"/>
              </properties>
              <properties key="method">
                <value tag="method" value="auto"/>
              </properties>
              <feature xsi:type="com.comsol.mph-v12:MeshFeatureList" model="/" sequence="//@mesh/@meshes[key='mesh1']/@value"/>
            </value>
          </features>
        </feature>
        <meshnative tag="/mesh2.mphbin" numEntities="24,32,9" numEntitiesMesh="24,32,9" spaceDim="2"/>
      </value>
    </meshes>
  </mesh>
  <modelNode model="/">
    <modelNodes key="mod1">
      <value tag="mod1" entityName="Model 1" entityComments="" entityAuthor="" entityCreationTime="1408457101409" identifier="mod1">
        <entityFlags>nodeactivate</entityFlags>
      </value>
    </modelNodes>
  </modelNode>
  <shape entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101436" model="/"/>
  <material entityName="Materials" entityComments="" entityAuthor="" entityCreationTime="1408455590371" model="/">
    <materials key="mat1">
      <value tag="mat1" storedParent="//@modelNode/@modelNodes[key='mod1']/@value" entityName="Polysilicon" entityComments="" entityAuthor="" entityCreationTime="1408471918716" identifier="mat1">
        <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408471918715" selType="geomdim" geom="//@geom/@geoms[key='geom1']/@value" allgeom="true" dim="2" hDim="2"/>
        <properties key="family">
          <value tag="family" value="custom"/>
        </properties>
        <properties key="specular">
          <value tag="specular" value="custom"/>
        </properties>
        <properties key="customspecular">
          <value tag="customspecular" valueArray="1|3,'0.7843137254901961','1','1'"/>
        </properties>
        <properties key="customspecular_vector_method">
          <value tag="customspecular_vector_method" value="step"/>
        </properties>
        <properties key="customspecular_vector_start">
          <value tag="customspecular_vector_start" value=""/>
        </properties>
        <properties key="customspecular_vector_stop">
          <value tag="customspecular_vector_stop" value=""/>
        </properties>
        <properties key="customspecular_vector_step">
          <value tag="customspecular_vector_step" value=""/>
        </properties>
        <properties key="customspecular_vector_numvalues">
          <value tag="customspecular_vector_numvalues" value=""/>
        </properties>
        <properties key="customspecular_vector_function">
          <value tag="customspecular_vector_function" value="none"/>
        </properties>
        <properties key="diffuse">
          <value tag="diffuse" value="custom"/>
        </properties>
        <properties key="customdiffuse">
          <value tag="customdiffuse" valueArray="1|3,'0.6666666666666666','0.6666666666666666','0.7058823529411765'"/>
        </properties>
        <properties key="customdiffuse_vector_method">
          <value tag="customdiffuse_vector_method" value="step"/>
        </properties>
        <properties key="customdiffuse_vector_start">
          <value tag="customdiffuse_vector_start" value=""/>
        </properties>
        <properties key="customdiffuse_vector_stop">
          <value tag="customdiffuse_vector_stop" value=""/>
        </properties>
        <properties key="customdiffuse_vector_step">
          <value tag="customdiffuse_vector_step" value=""/>
        </properties>
        <properties key="customdiffuse_vector_numvalues">
          <value tag="customdiffuse_vector_numvalues" value=""/>
        </properties>
        <properties key="customdiffuse_vector_function">
          <value tag="customdiffuse_vector_function" value="none"/>
        </properties>
        <properties key="ambient">
          <value tag="ambient" value="custom"/>
        </properties>
        <properties key="customambient">
          <value tag="customambient" valueArray="1|3,'0.6666666666666666','0.6666666666666666','0.7058823529411765'"/>
        </properties>
        <properties key="customambient_vector_method">
          <value tag="customambient_vector_method" value="step"/>
        </properties>
        <properties key="customambient_vector_start">
          <value tag="customambient_vector_start" value=""/>
        </properties>
        <properties key="customambient_vector_stop">
          <value tag="customambient_vector_stop" value=""/>
        </properties>
        <properties key="customambient_vector_step">
          <value tag="customambient_vector_step" value=""/>
        </properties>
        <properties key="customambient_vector_numvalues">
          <value tag="customambient_vector_numvalues" value=""/>
        </properties>
        <properties key="customambient_vector_function">
          <value tag="customambient_vector_function" value="none"/>
        </properties>
        <properties key="noise">
          <value tag="noise" value="on"/>
        </properties>
        <properties key="noisescale">
          <value tag="noisescale" value="0"/>
        </properties>
        <properties key="noisefreq">
          <value tag="noisefreq" value="1"/>
        </properties>
        <properties key="alpha">
          <value tag="alpha" value="1"/>
        </properties>
        <properties key="lighting">
          <value tag="lighting" value="cooktorrance"/>
        </properties>
        <properties key="fresnel">
          <value tag="fresnel" value="0.7"/>
        </properties>
        <properties key="roughness">
          <value tag="roughness" value="0.5"/>
        </properties>
        <properties key="shininess">
          <value tag="shininess" value="200"/>
        </properties>
        <properties key="lastfamily">
          <value tag="lastfamily" value="custom"/>
        </properties>
        <materialmodel entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408471918715" model="/">
          <models key="def">
            <value tag="def" entityName="Basic" entityComments="" entityAuthor="" entityCreationTime="1408471918723" identifier="def">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <param key="electricconductivity">
                <value tag="electricconductivity" value="9|1,'sigma(T)[S/m]'|1,'0'|1,'0'|1,'0'|1,'sigma(T)[S/m]'|1,'0'|1,'0'|1,'0'|1,'sigma(T)[S/m]'"/>
              </param>
              <param key="thermalexpansioncoefficient">
                <value tag="thermalexpansioncoefficient" value="9|1,'alpha(T)[1/K]'|1,'0'|1,'0'|1,'0'|1,'alpha(T)[1/K]'|1,'0'|1,'0'|1,'0'|1,'alpha(T)[1/K]'"/>
              </param>
              <param key="heatcapacity">
                <value tag="heatcapacity" value="1|1,'678[J/(kg*K)]'"/>
              </param>
              <param key="relpermittivity">
                <value tag="relpermittivity" value="9|1,'4.5'|1,'0'|1,'0'|1,'0'|1,'4.5'|1,'0'|1,'0'|1,'0'|1,'4.5'"/>
              </param>
              <param key="density">
                <value tag="density" value="1|1,'2320[kg/m^3]'"/>
              </param>
              <param key="thermalconductivity">
                <value tag="thermalconductivity" value="9|1,'k(T)[W/(m*K)]'|1,'0'|1,'0'|1,'0'|1,'k(T)[W/(m*K)]'|1,'0'|1,'0'|1,'0'|1,'k(T)[W/(m*K)]'"/>
              </param>
              <input>temperature</input>
              <func model="/">
                <features key="sigma">
                  <value xsi:type="com.comsol.mph-v12:FunctionFeature" tag="sigma" entityName="Analytic" entityComments="" entityAuthor="" entityCreationTime="1408471918767" operationID="Analytic">
                    <properties key="funcname">
                      <value tag="funcname" value="sigma"/>
                    </properties>
                    <properties key="expr">
                      <value tag="expr" value="1/(2e-5*(1+1.25e-3*(T-298.15)))"/>
                    </properties>
                    <properties key="args">
                      <value tag="args" valueArray="1|1,'T'"/>
                    </properties>
                    <properties key="dermethod">
                      <value tag="dermethod" value="manual"/>
                    </properties>
                    <properties key="argders">
                      <value tag="argders" valueArray="1|2,'T','d(1/(2e-5*(1+1.25e-3*(T-298.15)))\, T)'"/>
                    </properties>
                    <properties key="periodic">
                      <value tag="periodic" value="off"/>
                    </properties>
                    <properties key="periodiclower">
                      <value tag="periodiclower" value="0"/>
                    </properties>
                    <properties key="periodicupper">
                      <value tag="periodicupper" value="1"/>
                    </properties>
                    <properties key="argunit">
                      <value tag="argunit" value=""/>
                    </properties>
                    <properties key="fununit">
                      <value tag="fununit" value=""/>
                    </properties>
                    <properties key="complex">
                      <value tag="complex" value="off"/>
                    </properties>
                    <properties key="plotargs">
                      <value tag="plotargs" valueArray="1|3,'T','',''"/>
                    </properties>
                    <feature xsi:type="com.comsol.mph-v12:FunctionFeatureList" model="/"/>
                  </value>
                </features>
                <features key="alpha">
                  <value xsi:type="com.comsol.mph-v12:FunctionFeature" tag="alpha" entityName="Analytic 2" entityComments="" entityAuthor="" entityCreationTime="1408471918784" operationID="Analytic">
                    <properties key="funcname">
                      <value tag="funcname" value="alpha"/>
                    </properties>
                    <properties key="expr">
                      <value tag="expr" value="(3.725*(1-exp(-5.88e-3*(T-125)))+5.548e-4*T)*1e-6"/>
                    </properties>
                    <properties key="args">
                      <value tag="args" valueArray="1|1,'T'"/>
                    </properties>
                    <properties key="dermethod">
                      <value tag="dermethod" value="manual"/>
                    </properties>
                    <properties key="argders">
                      <value tag="argders" valueArray="1|2,'T','d((3.725*(1-exp(-5.88e-3*(T-125)))+5.548e-4*T)*1e-6\, T)'"/>
                    </properties>
                    <properties key="periodic">
                      <value tag="periodic" value="off"/>
                    </properties>
                    <properties key="periodiclower">
                      <value tag="periodiclower" value="0"/>
                    </properties>
                    <properties key="periodicupper">
                      <value tag="periodicupper" value="1"/>
                    </properties>
                    <properties key="argunit">
                      <value tag="argunit" value=""/>
                    </properties>
                    <properties key="fununit">
                      <value tag="fununit" value=""/>
                    </properties>
                    <properties key="complex">
                      <value tag="complex" value="off"/>
                    </properties>
                    <properties key="plotargs">
                      <value tag="plotargs" valueArray="1|3,'T','',''"/>
                    </properties>
                    <feature xsi:type="com.comsol.mph-v12:FunctionFeatureList" model="/"/>
                  </value>
                </features>
                <features key="k">
                  <value xsi:type="com.comsol.mph-v12:FunctionFeature" tag="k" entityName="Analytic 3" entityComments="" entityAuthor="" entityCreationTime="1408471918797" operationID="Analytic">
                    <properties key="funcname">
                      <value tag="funcname" value="k"/>
                    </properties>
                    <properties key="expr">
                      <value tag="expr" value="1/(-2.2e-11*T^3 + 9e-8*T^2 - 1e-5*T + 0.014)"/>
                    </properties>
                    <properties key="args">
                      <value tag="args" valueArray="1|1,'T'"/>
                    </properties>
                    <properties key="dermethod">
                      <value tag="dermethod" value="manual"/>
                    </properties>
                    <properties key="argders">
                      <value tag="argders" valueArray="1|2,'T','d(1/(-2.2e-11*T^3 + 9e-8*T^2 - 1e-5*T + 0.014)\, T)'"/>
                    </properties>
                    <properties key="periodic">
                      <value tag="periodic" value="off"/>
                    </properties>
                    <properties key="periodiclower">
                      <value tag="periodiclower" value="0"/>
                    </properties>
                    <properties key="periodicupper">
                      <value tag="periodicupper" value="1"/>
                    </properties>
                    <properties key="argunit">
                      <value tag="argunit" value=""/>
                    </properties>
                    <properties key="fununit">
                      <value tag="fununit" value=""/>
                    </properties>
                    <properties key="complex">
                      <value tag="complex" value="off"/>
                    </properties>
                    <properties key="plotargs">
                      <value tag="plotargs" valueArray="1|3,'T','',''"/>
                    </properties>
                    <feature xsi:type="com.comsol.mph-v12:FunctionFeatureList" model="/"/>
                  </value>
                </features>
              </func>
            </value>
          </models>
          <models key="Enu">
            <value tag="Enu" entityName="Young's modulus and Poisson's ratio" entityComments="" entityAuthor="" entityCreationTime="1408471918819" identifier="Enu">
              <entityFlags>norename</entityFlags>
              <info model="/">
                <objects key="category">
                  <value tag="category" body="Solid_mechanics/Linear_elastic_material"/>
                </objects>
              </info>
              <param key="youngsmodulus">
                <value tag="youngsmodulus" value="1|1,'169e9[Pa]'"/>
              </param>
              <param key="poissonsratio">
                <value tag="poissonsratio" value="1|1,'0.22'"/>
              </param>
              <func model="/"/>
            </value>
          </models>
          <models key="linzRes">
            <value tag="linzRes" entityName="Linearized resistivity" entityComments="" entityAuthor="" entityCreationTime="1408471918834" identifier="ltr">
              <entityFlags>norename</entityFlags>
              <info model="/">
                <objects key="category">
                  <value tag="category" body="Electromagnetic_models"/>
                </objects>
              </info>
              <param key="rho0">
                <value tag="rho0" value="1|1,'2e-5'"/>
              </param>
              <param key="alpha">
                <value tag="alpha" value="1|1,'1.25e-3'"/>
              </param>
              <param key="Tref">
                <value tag="Tref" value="1|1,'298.15[K]'"/>
              </param>
              <input>temperature</input>
              <func model="/"/>
              <output>rho0</output>
              <output>alpha</output>
              <output>Tref</output>
            </value>
          </models>
        </materialmodel>
      </value>
    </materials>
    <materials key="mat2">
      <value tag="mat2" storedParent="//@modelNode/@modelNodes[key='mod1']/@value" entityName="Tungsten" entityComments="" entityAuthor="" entityCreationTime="1408471933423" identifier="mat2">
        <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408471933422" selType="geomdim" geom="//@geom/@geoms[key='geom1']/@value" domains="10,6,9" dim="2" hDim="2"/>
        <properties key="family">
          <value tag="family" value="custom"/>
        </properties>
        <properties key="specular">
          <value tag="specular" value="custom"/>
        </properties>
        <properties key="customspecular">
          <value tag="customspecular" valueArray="1|3,'0.7843137254901961','0.7843137254901961','0.7843137254901961'"/>
        </properties>
        <properties key="customspecular_vector_method">
          <value tag="customspecular_vector_method" value="step"/>
        </properties>
        <properties key="customspecular_vector_start">
          <value tag="customspecular_vector_start" value=""/>
        </properties>
        <properties key="customspecular_vector_stop">
          <value tag="customspecular_vector_stop" value=""/>
        </properties>
        <properties key="customspecular_vector_step">
          <value tag="customspecular_vector_step" value=""/>
        </properties>
        <properties key="customspecular_vector_numvalues">
          <value tag="customspecular_vector_numvalues" value=""/>
        </properties>
        <properties key="customspecular_vector_function">
          <value tag="customspecular_vector_function" value="none"/>
        </properties>
        <properties key="diffuse">
          <value tag="diffuse" value="custom"/>
        </properties>
        <properties key="customdiffuse">
          <value tag="customdiffuse" valueArray="1|3,'0.7843137254901961','0.7843137254901961','0.7843137254901961'"/>
        </properties>
        <properties key="customdiffuse_vector_method">
          <value tag="customdiffuse_vector_method" value="step"/>
        </properties>
        <properties key="customdiffuse_vector_start">
          <value tag="customdiffuse_vector_start" value=""/>
        </properties>
        <properties key="customdiffuse_vector_stop">
          <value tag="customdiffuse_vector_stop" value=""/>
        </properties>
        <properties key="customdiffuse_vector_step">
          <value tag="customdiffuse_vector_step" value=""/>
        </properties>
        <properties key="customdiffuse_vector_numvalues">
          <value tag="customdiffuse_vector_numvalues" value=""/>
        </properties>
        <properties key="customdiffuse_vector_function">
          <value tag="customdiffuse_vector_function" value="none"/>
        </properties>
        <properties key="ambient">
          <value tag="ambient" value="custom"/>
        </properties>
        <properties key="customambient">
          <value tag="customambient" valueArray="1|3,'0.7058823529411765','0.7058823529411765','0.7058823529411765'"/>
        </properties>
        <properties key="customambient_vector_method">
          <value tag="customambient_vector_method" value="step"/>
        </properties>
        <properties key="customambient_vector_start">
          <value tag="customambient_vector_start" value=""/>
        </properties>
        <properties key="customambient_vector_stop">
          <value tag="customambient_vector_stop" value=""/>
        </properties>
        <properties key="customambient_vector_step">
          <value tag="customambient_vector_step" value=""/>
        </properties>
        <properties key="customambient_vector_numvalues">
          <value tag="customambient_vector_numvalues" value=""/>
        </properties>
        <properties key="customambient_vector_function">
          <value tag="customambient_vector_function" value="none"/>
        </properties>
        <properties key="noise">
          <value tag="noise" value="on"/>
        </properties>
        <properties key="noisescale">
          <value tag="noisescale" value="0"/>
        </properties>
        <properties key="noisefreq">
          <value tag="noisefreq" value="1"/>
        </properties>
        <properties key="alpha">
          <value tag="alpha" value="1"/>
        </properties>
        <properties key="lighting">
          <value tag="lighting" value="cooktorrance"/>
        </properties>
        <properties key="fresnel">
          <value tag="fresnel" value="0.9"/>
        </properties>
        <properties key="roughness">
          <value tag="roughness" value="0.15"/>
        </properties>
        <properties key="shininess">
          <value tag="shininess" value="200"/>
        </properties>
        <properties key="lastfamily">
          <value tag="lastfamily" value="custom"/>
        </properties>
        <materialmodel entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408471933422" model="/">
          <models key="def">
            <value tag="def" entityName="Basic" entityComments="" entityAuthor="" entityCreationTime="1408471933426" identifier="def">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <param key="thermalexpansioncoefficient">
                <value tag="thermalexpansioncoefficient" value="9|1,'4.5e-6[1/K]'|1,'0'|1,'0'|1,'0'|1,'4.5e-6[1/K]'|1,'0'|1,'0'|1,'0'|1,'4.5e-6[1/K]'"/>
              </param>
              <param key="density">
                <value tag="density" value="1|1,'17800[kg/m^3]'"/>
              </param>
              <func model="/"/>
            </value>
          </models>
          <models key="Enu">
            <value tag="Enu" entityName="Young's modulus and Poisson's ratio" entityComments="" entityAuthor="" entityCreationTime="1408471933440" identifier="Enu">
              <entityFlags>norename</entityFlags>
              <info model="/">
                <objects key="category">
                  <value tag="category" body="Solid_mechanics/Linear_elastic_material"/>
                </objects>
              </info>
              <param key="youngsmodulus">
                <value tag="youngsmodulus" value="1|1,'3.6e11[Pa]'"/>
              </param>
              <param key="poissonsratio">
                <value tag="poissonsratio" value="1|1,'0.27'"/>
              </param>
              <func model="/"/>
            </value>
          </models>
          <models key="Murnaghan">
            <value tag="Murnaghan" entityName="Murnaghan" entityComments="" entityAuthor="" entityCreationTime="1408471933455" identifier="Murnaghan">
              <entityFlags>norename</entityFlags>
              <info model="/">
                <objects key="category">
                  <value tag="category" body="Solid_mechanics/Hyperelastic_material"/>
                </objects>
              </info>
              <param key="l">
                <value tag="l" value="1|1,'-4.7e11[Pa]'"/>
              </param>
              <param key="m">
                <value tag="m" value="1|1,'-7.9e11[Pa]'"/>
              </param>
              <param key="n">
                <value tag="n" value="1|1,'-1.1e12[Pa]'"/>
              </param>
              <param key="lambLame">
                <value tag="lambLame" value="1|1,'1.6e11[Pa]'"/>
              </param>
              <param key="muLame">
                <value tag="muLame" value="1|1,'1.4e11[Pa]'"/>
              </param>
              <func model="/"/>
              <output>l</output>
              <output>m</output>
              <output>n</output>
              <output>lambLame</output>
              <output>muLame</output>
            </value>
          </models>
          <models key="Lame">
            <value tag="Lame" entityName="Lamé constants" entityComments="" entityAuthor="" entityCreationTime="1408471933494" identifier="Lame">
              <entityFlags>norename</entityFlags>
              <info model="/">
                <objects key="category">
                  <value tag="category" body="Solid_mechanics/Linear_elastic_material"/>
                </objects>
              </info>
              <param key="lambLame">
                <value tag="lambLame" value="1|1,'1.6e11[Pa]'"/>
              </param>
              <param key="muLame">
                <value tag="muLame" value="1|1,'1.4e11[Pa]'"/>
              </param>
              <func model="/"/>
              <output>lambLame</output>
              <output>muLame</output>
            </value>
          </models>
          <models key="NeoHookean">
            <value tag="NeoHookean" entityName="Neo-Hookean" entityComments="" entityAuthor="" entityCreationTime="1408471933509" identifier="NeoHookean">
              <entityFlags>norename</entityFlags>
              <info model="/">
                <objects key="category">
                  <value tag="category" body="Solid_mechanics/Hyperelastic_material"/>
                </objects>
              </info>
              <param key="mu">
                <value tag="mu" value="1|1,'1.4e11[Pa]'"/>
              </param>
              <param key="lambda">
                <value tag="lambda" value="1|1,'1.6e11[Pa]'"/>
              </param>
              <func model="/"/>
              <output>mu</output>
              <output>lambda</output>
            </value>
          </models>
        </materialmodel>
      </value>
    </materials>
    <materials key="mat3">
      <value tag="mat3" storedParent="//@modelNode/@modelNodes[key='mod1']/@value" entityName="Lead Zirconate Titanate (PZT-5H)" entityComments="" entityAuthor="" entityCreationTime="1408471966927" identifier="mat3">
        <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408471966927" selType="geomdim" geom="//@geom/@geoms[key='geom1']/@value" domains="10,4" dim="2" hDim="2"/>
        <properties key="family">
          <value tag="family" value="lead"/>
        </properties>
        <properties key="specular">
          <value tag="specular" value="white"/>
        </properties>
        <properties key="customspecular">
          <value tag="customspecular" valueArray="1|3,'1','1','1'"/>
        </properties>
        <properties key="customspecular_vector_method">
          <value tag="customspecular_vector_method" value="step"/>
        </properties>
        <properties key="customspecular_vector_start">
          <value tag="customspecular_vector_start" value=""/>
        </properties>
        <properties key="customspecular_vector_stop">
          <value tag="customspecular_vector_stop" value=""/>
        </properties>
        <properties key="customspecular_vector_step">
          <value tag="customspecular_vector_step" value=""/>
        </properties>
        <properties key="customspecular_vector_numvalues">
          <value tag="customspecular_vector_numvalues" value=""/>
        </properties>
        <properties key="customspecular_vector_function">
          <value tag="customspecular_vector_function" value="none"/>
        </properties>
        <properties key="diffuse">
          <value tag="diffuse" value="white"/>
        </properties>
        <properties key="customdiffuse">
          <value tag="customdiffuse" valueArray="1|3,'1','1','1'"/>
        </properties>
        <properties key="customdiffuse_vector_method">
          <value tag="customdiffuse_vector_method" value="step"/>
        </properties>
        <properties key="customdiffuse_vector_start">
          <value tag="customdiffuse_vector_start" value=""/>
        </properties>
        <properties key="customdiffuse_vector_stop">
          <value tag="customdiffuse_vector_stop" value=""/>
        </properties>
        <properties key="customdiffuse_vector_step">
          <value tag="customdiffuse_vector_step" value=""/>
        </properties>
        <properties key="customdiffuse_vector_numvalues">
          <value tag="customdiffuse_vector_numvalues" value=""/>
        </properties>
        <properties key="customdiffuse_vector_function">
          <value tag="customdiffuse_vector_function" value="none"/>
        </properties>
        <properties key="ambient">
          <value tag="ambient" value="white"/>
        </properties>
        <properties key="customambient">
          <value tag="customambient" valueArray="1|3,'1','1','1'"/>
        </properties>
        <properties key="customambient_vector_method">
          <value tag="customambient_vector_method" value="step"/>
        </properties>
        <properties key="customambient_vector_start">
          <value tag="customambient_vector_start" value=""/>
        </properties>
        <properties key="customambient_vector_stop">
          <value tag="customambient_vector_stop" value=""/>
        </properties>
        <properties key="customambient_vector_step">
          <value tag="customambient_vector_step" value=""/>
        </properties>
        <properties key="customambient_vector_numvalues">
          <value tag="customambient_vector_numvalues" value=""/>
        </properties>
        <properties key="customambient_vector_function">
          <value tag="customambient_vector_function" value="none"/>
        </properties>
        <properties key="noise">
          <value tag="noise" value="off"/>
        </properties>
        <properties key="noisescale">
          <value tag="noisescale" value="0"/>
        </properties>
        <properties key="noisefreq">
          <value tag="noisefreq" value="0"/>
        </properties>
        <properties key="alpha">
          <value tag="alpha" value="1"/>
        </properties>
        <properties key="lighting">
          <value tag="lighting" value="simple"/>
        </properties>
        <properties key="fresnel">
          <value tag="fresnel" value="0.5"/>
        </properties>
        <properties key="roughness">
          <value tag="roughness" value="0.1"/>
        </properties>
        <properties key="shininess">
          <value tag="shininess" value="100"/>
        </properties>
        <properties key="lastfamily">
          <value tag="lastfamily" value="lead"/>
        </properties>
        <materialmodel entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408471966926" model="/">
          <models key="def">
            <value tag="def" entityName="Basic" entityComments="" entityAuthor="" entityCreationTime="1408471966931" identifier="def">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <param key="density">
                <value tag="density" value="1|1,'7500[kg/m^3]'"/>
              </param>
              <param key="youngsmodulus">
                <value tag="youngsmodulus" value="1|1,'101e9'"/>
              </param>
              <param key="poissonsratio">
                <value tag="poissonsratio" value="1|1,'.3'"/>
              </param>
              <func model="/"/>
            </value>
          </models>
          <models key="StrainCharge">
            <value tag="StrainCharge" entityName="Strain-charge form" entityComments="" entityAuthor="" entityCreationTime="1408471966936" identifier="StrainCharge">
              <entityFlags>norename</entityFlags>
              <info model="/">
                <objects key="category">
                  <value tag="category" body="Piezoelectric_models"/>
                </objects>
              </info>
              <param key="sE">
                <value tag="sE" value="36|1,'1.65e-011[1/Pa]'|1,'-4.78e-012[1/Pa]'|1,'-8.45e-012[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'-4.78e-012[1/Pa]'|1,'1.65e-011[1/Pa]'|1,'-8.45e-012[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'-8.45e-012[1/Pa]'|1,'-8.45e-012[1/Pa]'|1,'2.07e-011[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'4.35e-011[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'4.35e-011[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'0[1/Pa]'|1,'4.26e-011[1/Pa]'"/>
              </param>
              <param key="dET">
                <value tag="dET" value="18|1,'0[C/N]'|1,'0[C/N]'|1,'-2.74e-010[C/N]'|1,'0[C/N]'|1,'0[C/N]'|1,'-2.74e-010[C/N]'|1,'0[C/N]'|1,'0[C/N]'|1,'5.93e-010[C/N]'|1,'0[C/N]'|1,'7.41e-010[C/N]'|1,'0[C/N]'|1,'7.41e-010[C/N]'|1,'0[C/N]'|1,'0[C/N]'|1,'0[C/N]'|1,'0[C/N]'|1,'0[C/N]'"/>
              </param>
              <param key="epsilonrT">
                <value tag="epsilonrT" value="9|1,'3130'|1,'0'|1,'0'|1,'0'|1,'3130'|1,'0'|1,'0'|1,'0'|1,'3400'"/>
              </param>
              <param key="eta_sE">
                <value tag="eta_sE" value="36|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="eta_dET">
                <value tag="eta_dET" value="18|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="eta_epsilonT">
                <value tag="eta_epsilonT" value="9|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
              </param>
              <func model="/"/>
              <output>sE</output>
              <output>dET</output>
              <output>epsilonrT</output>
              <output>eta_sE</output>
              <output>eta_dET</output>
              <output>eta_epsilonT</output>
            </value>
          </models>
          <models key="StressCharge">
            <value tag="StressCharge" entityName="Stress-charge form" entityComments="" entityAuthor="" entityCreationTime="1408471967045" identifier="StressCharge">
              <entityFlags>norename</entityFlags>
              <info model="/">
                <objects key="category">
                  <value tag="category" body="Piezoelectric_models"/>
                </objects>
              </info>
              <param key="cE">
                <value tag="cE" value="36|1,'1.27205e+011[Pa]'|1,'8.02122e+010[Pa]'|1,'8.46702e+010[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'8.02122e+010[Pa]'|1,'1.27205e+011[Pa]'|1,'8.46702e+010[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'8.46702e+010[Pa]'|1,'8.46702e+010[Pa]'|1,'1.17436e+011[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'2.29885e+010[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'2.29885e+010[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'0[Pa]'|1,'2.34742e+010[Pa]'"/>
              </param>
              <param key="eES">
                <value tag="eES" value="18|1,'0[C/m^2]'|1,'0[C/m^2]'|1,'-6.62281[C/m^2]'|1,'0[C/m^2]'|1,'0[C/m^2]'|1,'-6.62281[C/m^2]'|1,'0[C/m^2]'|1,'0[C/m^2]'|1,'23.2403[C/m^2]'|1,'0[C/m^2]'|1,'17.0345[C/m^2]'|1,'0[C/m^2]'|1,'17.0345[C/m^2]'|1,'0[C/m^2]'|1,'0[C/m^2]'|1,'0[C/m^2]'|1,'0[C/m^2]'|1,'0[C/m^2]'"/>
              </param>
              <param key="epsilonrS">
                <value tag="epsilonrS" value="9|1,'1704.4'|1,'0'|1,'0'|1,'0'|1,'1704.4'|1,'0'|1,'0'|1,'0'|1,'1433.6'"/>
              </param>
              <param key="eta_cE">
                <value tag="eta_cE" value="36|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="eta_eES">
                <value tag="eta_eES" value="18|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="eta_epsilonS">
                <value tag="eta_epsilonS" value="9|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
              </param>
              <func model="/"/>
              <output>cE</output>
              <output>eES</output>
              <output>epsilonrS</output>
              <output>eta_cE</output>
              <output>eta_eES</output>
              <output>eta_epsilonS</output>
            </value>
          </models>
        </materialmodel>
      </value>
    </materials>
    <materials key="mat4">
      <value tag="mat4" storedParent="//@modelNode/@modelNodes[key='mod1']/@value" entityName="Iridium" entityComments="" entityAuthor="" entityCreationTime="1408473766467" identifier="mat4">
        <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408473766466" selType="geomdim" geom="//@geom/@geoms[key='geom1']/@value" domains="10,3,5" dim="2" hDim="2"/>
        <properties key="family">
          <value tag="family" value="plastic"/>
        </properties>
        <properties key="specular">
          <value tag="specular" value="white"/>
        </properties>
        <properties key="customspecular">
          <value tag="customspecular" valueArray="1|3,'1','1','1'"/>
        </properties>
        <properties key="customspecular_vector_method">
          <value tag="customspecular_vector_method" value="step"/>
        </properties>
        <properties key="customspecular_vector_start">
          <value tag="customspecular_vector_start" value=""/>
        </properties>
        <properties key="customspecular_vector_stop">
          <value tag="customspecular_vector_stop" value=""/>
        </properties>
        <properties key="customspecular_vector_step">
          <value tag="customspecular_vector_step" value=""/>
        </properties>
        <properties key="customspecular_vector_numvalues">
          <value tag="customspecular_vector_numvalues" value=""/>
        </properties>
        <properties key="customspecular_vector_function">
          <value tag="customspecular_vector_function" value="none"/>
        </properties>
        <properties key="diffuse">
          <value tag="diffuse" value="white"/>
        </properties>
        <properties key="customdiffuse">
          <value tag="customdiffuse" valueArray="1|3,'1','1','1'"/>
        </properties>
        <properties key="customdiffuse_vector_method">
          <value tag="customdiffuse_vector_method" value="step"/>
        </properties>
        <properties key="customdiffuse_vector_start">
          <value tag="customdiffuse_vector_start" value=""/>
        </properties>
        <properties key="customdiffuse_vector_stop">
          <value tag="customdiffuse_vector_stop" value=""/>
        </properties>
        <properties key="customdiffuse_vector_step">
          <value tag="customdiffuse_vector_step" value=""/>
        </properties>
        <properties key="customdiffuse_vector_numvalues">
          <value tag="customdiffuse_vector_numvalues" value=""/>
        </properties>
        <properties key="customdiffuse_vector_function">
          <value tag="customdiffuse_vector_function" value="none"/>
        </properties>
        <properties key="ambient">
          <value tag="ambient" value="white"/>
        </properties>
        <properties key="customambient">
          <value tag="customambient" valueArray="1|3,'1','1','1'"/>
        </properties>
        <properties key="customambient_vector_method">
          <value tag="customambient_vector_method" value="step"/>
        </properties>
        <properties key="customambient_vector_start">
          <value tag="customambient_vector_start" value=""/>
        </properties>
        <properties key="customambient_vector_stop">
          <value tag="customambient_vector_stop" value=""/>
        </properties>
        <properties key="customambient_vector_step">
          <value tag="customambient_vector_step" value=""/>
        </properties>
        <properties key="customambient_vector_numvalues">
          <value tag="customambient_vector_numvalues" value=""/>
        </properties>
        <properties key="customambient_vector_function">
          <value tag="customambient_vector_function" value="none"/>
        </properties>
        <properties key="noise">
          <value tag="noise" value="off"/>
        </properties>
        <properties key="noisescale">
          <value tag="noisescale" value="0"/>
        </properties>
        <properties key="noisefreq">
          <value tag="noisefreq" value="0"/>
        </properties>
        <properties key="alpha">
          <value tag="alpha" value="1"/>
        </properties>
        <properties key="lighting">
          <value tag="lighting" value="simple"/>
        </properties>
        <properties key="fresnel">
          <value tag="fresnel" value="0.5"/>
        </properties>
        <properties key="roughness">
          <value tag="roughness" value="0.1"/>
        </properties>
        <properties key="shininess">
          <value tag="shininess" value="100"/>
        </properties>
        <properties key="lastfamily">
          <value tag="lastfamily" value="plastic"/>
        </properties>
        <materialmodel entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408473766465" model="/">
          <models key="def">
            <value tag="def" entityName="Basic" entityComments="" entityAuthor="" entityCreationTime="1408473766470" identifier="def">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <param key="youngsmodulus">
                <value tag="youngsmodulus" value="1|1,'528e9'"/>
              </param>
              <param key="poissonsratio">
                <value tag="poissonsratio" value="1|1,'.26'"/>
              </param>
              <param key="density">
                <value tag="density" value="1|1,'22560'"/>
              </param>
              <func model="/"/>
            </value>
          </models>
        </materialmodel>
      </value>
    </materials>
    <materials key="mat5">
      <value tag="mat5" storedParent="//@modelNode/@modelNodes[key='mod1']/@value" entityName="TiAlN" entityComments="" entityAuthor="" entityCreationTime="1408552119285" identifier="mat5">
        <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408552119283" selType="geomdim" geom="//@geom/@geoms[key='geom1']/@value" domains="10,2,7" dim="2" hDim="2"/>
        <properties key="family">
          <value tag="family" value="plastic"/>
        </properties>
        <properties key="specular">
          <value tag="specular" value="white"/>
        </properties>
        <properties key="customspecular">
          <value tag="customspecular" valueArray="1|3,'1','1','1'"/>
        </properties>
        <properties key="customspecular_vector_method">
          <value tag="customspecular_vector_method" value="step"/>
        </properties>
        <properties key="customspecular_vector_start">
          <value tag="customspecular_vector_start" value=""/>
        </properties>
        <properties key="customspecular_vector_stop">
          <value tag="customspecular_vector_stop" value=""/>
        </properties>
        <properties key="customspecular_vector_step">
          <value tag="customspecular_vector_step" value=""/>
        </properties>
        <properties key="customspecular_vector_numvalues">
          <value tag="customspecular_vector_numvalues" value=""/>
        </properties>
        <properties key="customspecular_vector_function">
          <value tag="customspecular_vector_function" value="none"/>
        </properties>
        <properties key="diffuse">
          <value tag="diffuse" value="white"/>
        </properties>
        <properties key="customdiffuse">
          <value tag="customdiffuse" valueArray="1|3,'1','1','1'"/>
        </properties>
        <properties key="customdiffuse_vector_method">
          <value tag="customdiffuse_vector_method" value="step"/>
        </properties>
        <properties key="customdiffuse_vector_start">
          <value tag="customdiffuse_vector_start" value=""/>
        </properties>
        <properties key="customdiffuse_vector_stop">
          <value tag="customdiffuse_vector_stop" value=""/>
        </properties>
        <properties key="customdiffuse_vector_step">
          <value tag="customdiffuse_vector_step" value=""/>
        </properties>
        <properties key="customdiffuse_vector_numvalues">
          <value tag="customdiffuse_vector_numvalues" value=""/>
        </properties>
        <properties key="customdiffuse_vector_function">
          <value tag="customdiffuse_vector_function" value="none"/>
        </properties>
        <properties key="ambient">
          <value tag="ambient" value="white"/>
        </properties>
        <properties key="customambient">
          <value tag="customambient" valueArray="1|3,'1','1','1'"/>
        </properties>
        <properties key="customambient_vector_method">
          <value tag="customambient_vector_method" value="step"/>
        </properties>
        <properties key="customambient_vector_start">
          <value tag="customambient_vector_start" value=""/>
        </properties>
        <properties key="customambient_vector_stop">
          <value tag="customambient_vector_stop" value=""/>
        </properties>
        <properties key="customambient_vector_step">
          <value tag="customambient_vector_step" value=""/>
        </properties>
        <properties key="customambient_vector_numvalues">
          <value tag="customambient_vector_numvalues" value=""/>
        </properties>
        <properties key="customambient_vector_function">
          <value tag="customambient_vector_function" value="none"/>
        </properties>
        <properties key="noise">
          <value tag="noise" value="off"/>
        </properties>
        <properties key="noisescale">
          <value tag="noisescale" value="0"/>
        </properties>
        <properties key="noisefreq">
          <value tag="noisefreq" value="0"/>
        </properties>
        <properties key="alpha">
          <value tag="alpha" value="1"/>
        </properties>
        <properties key="lighting">
          <value tag="lighting" value="simple"/>
        </properties>
        <properties key="fresnel">
          <value tag="fresnel" value="0.5"/>
        </properties>
        <properties key="roughness">
          <value tag="roughness" value="0.1"/>
        </properties>
        <properties key="shininess">
          <value tag="shininess" value="100"/>
        </properties>
        <properties key="lastfamily">
          <value tag="lastfamily" value="plastic"/>
        </properties>
        <materialmodel entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408552119282" model="/">
          <models key="def">
            <value tag="def" entityName="Basic" entityComments="" entityAuthor="" entityCreationTime="1408552119290" identifier="def">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <param key="youngsmodulus">
                <value tag="youngsmodulus" value="1|1,'252e9'"/>
              </param>
              <param key="poissonsratio">
                <value tag="poissonsratio" value="1|1,'.25'"/>
              </param>
              <param key="density">
                <value tag="density" value="1|1,'4240'"/>
              </param>
              <func model="/"/>
            </value>
          </models>
        </materialmodel>
      </value>
    </materials>
    <valid>true</valid>
  </material>
  <physics entityName="Physics" entityComments="" entityAuthor="" entityCreationTime="1408455590368" model="/">
    <physints key="solid">
      <value tag="solid" entityName="Solid Mechanics" entityComments="" entityAuthor="" entityCreationTime="1408457101612" applmodeID="SolidMechanics" geom="//@geom/@geoms[key='geom1']/@value" applmodeIDs="0" identifier="solid">
        <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408457101454" selType="geomdim" geom="//@geom/@geoms[key='geom1']/@value" allgeom="true" dim="2" hDim="2"/>
        <prop model="/">
          <props key="ShapeProperty">
            <value tag="ShapeProperty" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="order_displacement">
                <value tag="order_displacement" value="1|1,'2'"/>
              </param>
              <param key="boundaryFlux_displacement">
                <value tag="boundaryFlux_displacement" value="1|1,'0'"/>
              </param>
              <param key="hiddenRowLabels">
                <value tag="hiddenRowLabels" value="1|1,'Displacement field'"/>
              </param>
              <param key="valueType">
                <value tag="valueType" value="1|1,'complex'"/>
              </param>
              <param key="frame">
                <value tag="frame" value="1|1,'material'"/>
              </param>
            </value>
          </props>
          <props key="EquationForm">
            <value tag="EquationForm" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="form">
                <value tag="form" value="1|1,'Automatic'"/>
              </param>
              <param key="freq_src">
                <value tag="freq_src" value="1|1,'fromSolver'"/>
              </param>
              <param key="freq">
                <value tag="freq" value="1|1,'1[kHz]'"/>
              </param>
              <param key="showAllModelInputs">
                <value tag="showAllModelInputs" value="1|1,'0'"/>
              </param>
            </value>
          </props>
          <props key="ControlsSpatialFrame">
            <value tag="ControlsSpatialFrame" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="ControlsSpatialFrame">
                <value tag="ControlsSpatialFrame" value="1|1,'1'"/>
              </param>
            </value>
          </props>
          <props key="Type2D">
            <value tag="Type2D" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="Type2D">
                <value tag="Type2D" value="1|1,'PlaneStrain'"/>
              </param>
            </value>
          </props>
          <props key="d">
            <value tag="d" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="d">
                <value tag="d" value="1|1,'1'"/>
              </param>
            </value>
          </props>
          <props key="refpnt">
            <value tag="refpnt" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="refpnt">
                <value tag="refpnt" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
            </value>
          </props>
          <props key="AddMixedFormPressure">
            <value tag="AddMixedFormPressure" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="AddMixedFormPressure">
                <value tag="AddMixedFormPressure" value="1|1,'0'"/>
              </param>
            </value>
          </props>
          <props key="StructuralTransientBehavior">
            <value tag="StructuralTransientBehavior" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="StructuralTransientBehavior">
                <value tag="StructuralTransientBehavior" value="1|1,'IncludeInertia'"/>
              </param>
            </value>
          </props>
          <props key="cref">
            <value tag="cref" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="cref">
                <value tag="cref" value="1|1,'solid.cp'"/>
              </param>
            </value>
          </props>
          <props key="StudyStep">
            <value tag="StudyStep" applmode="//@physics/@physints[key='solid']/@value">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <param key="StudyStep">
                <value tag="StudyStep" value="1|1,'std1/stat'"/>
              </param>
            </value>
          </props>
        </prop>
        <field model="/">
          <fields key="displacement">
            <value tag="displacement" applfieldID="displacement" components="3,'u','v','w'" applmode="//@physics/@physints[key='solid']/@value" fieldname="u">
              <entityFlags>noremove</entityFlags>
              <entityFlags>norename</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
            </value>
          </fields>
        </field>
        <feature model="/" appl="//@physics/@physints[key='solid']/@value">
          <features key="lemm1">
            <value tag="lemm1" entityName="Linear Elastic Material 1" entityComments="" entityAuthor="" entityCreationTime="1408457101456" applfeatureID="LinearElasticModel" applmode="//@physics/@physints[key='solid']/@value" edim="2" default="true">
              <tags tag="DomainType" values="1,'GEOMETRY'"/>
              <entityFlags>noremove</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408457101458" selType="geomdim" locked="true" geom="//@geom/@geoms[key='geom1']/@value" allgeom="true" dim="2" hDim="2"/>
              <param key="E_mat">
                <value tag="E_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="E">
                <value tag="E" value="1|1,'0'"/>
              </param>
              <param key="nu_mat">
                <value tag="nu_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="nu">
                <value tag="nu" value="1|1,'0'"/>
              </param>
              <param key="K_mat">
                <value tag="K_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="K">
                <value tag="K" value="1|1,'0'"/>
              </param>
              <param key="G_mat">
                <value tag="G_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="G">
                <value tag="G" value="1|1,'0'"/>
              </param>
              <param key="lambLame_mat">
                <value tag="lambLame_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="lambLame">
                <value tag="lambLame" value="1|1,'0'"/>
              </param>
              <param key="muLame_mat">
                <value tag="muLame_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="muLame">
                <value tag="muLame" value="1|1,'0'"/>
              </param>
              <param key="cp_mat">
                <value tag="cp_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="cp">
                <value tag="cp" value="1|1,'0'"/>
              </param>
              <param key="cs_mat">
                <value tag="cs_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="cs">
                <value tag="cs" value="1|1,'0'"/>
              </param>
              <param key="Evector_mat">
                <value tag="Evector_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="Evector">
                <value tag="Evector" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="nuvector_mat">
                <value tag="nuvector_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="nuvector">
                <value tag="nuvector" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="Gvector_mat">
                <value tag="Gvector_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="Gvector">
                <value tag="Gvector" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="GvectorVo_mat">
                <value tag="GvectorVo_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="GvectorVo">
                <value tag="GvectorVo" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="D_mat">
                <value tag="D_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="D">
                <value tag="D" value="36|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="DVo_mat">
                <value tag="DVo_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="DVo">
                <value tag="DVo" value="36|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="rho_mat">
                <value tag="rho_mat" value="1|1,'from_mat'"/>
              </param>
              <param key="rho">
                <value tag="rho" value="1|1,'0'"/>
              </param>
              <param key="AdvMatRes">
                <value tag="AdvMatRes" value="1|1,'0'"/>
              </param>
              <param key="advMatVar">
                <value tag="advMatVar" value="1|1,'0'"/>
              </param>
              <param key="ForceLinearStrainRes">
                <value tag="ForceLinearStrainRes" value="1|1,'0'"/>
              </param>
              <param key="SolidModel">
                <value tag="SolidModel" value="1|1,'Isotropic'"/>
              </param>
              <param key="IsotropicOption">
                <value tag="IsotropicOption" value="1|1,'Enu'"/>
              </param>
              <param key="OrthotropicOption">
                <value tag="OrthotropicOption" value="1|1,'OrthotropicStd'"/>
              </param>
              <param key="AnisotropicOption">
                <value tag="AnisotropicOption" value="1|1,'AnisotropicStd'"/>
              </param>
              <param key="AnisotropicLossOrder">
                <value tag="AnisotropicLossOrder" value="1|1,'AnisotropicStd'"/>
              </param>
              <param key="NearlyIncompressible">
                <value tag="NearlyIncompressible" value="1|1,'0'"/>
              </param>
              <param key="coordinateSystem">
                <value tag="coordinateSystem" value="1|1,'GlobalSystem'"/>
              </param>
              <param key="EnergyDissipation">
                <value tag="EnergyDissipation" value="1|1,'0'"/>
              </param>
              <param key="CalculateDissipatedCreepEnergy">
                <value tag="CalculateDissipatedCreepEnergy" value="1|1,'0'"/>
              </param>
              <param key="minput_temperature_src">
                <value tag="minput_temperature_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_temperature">
                <value tag="minput_temperature" value="1|1,'293.15[K]'"/>
              </param>
              <param key="minput_pressure_src">
                <value tag="minput_pressure_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_pressure">
                <value tag="minput_pressure" value="1|1,'1[atm]'"/>
              </param>
              <param key="minput_electricfield_src">
                <value tag="minput_electricfield_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_electricfield">
                <value tag="minput_electricfield" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="minput_magneticfield_src">
                <value tag="minput_magneticfield_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_magneticfield">
                <value tag="minput_magneticfield" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="minput_magneticfluxdensity_src">
                <value tag="minput_magneticfluxdensity_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_magneticfluxdensity">
                <value tag="minput_magneticfluxdensity" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="minput_velocity_src">
                <value tag="minput_velocity_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_velocity">
                <value tag="minput_velocity" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="minput_frequency_src">
                <value tag="minput_frequency_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_frequency">
                <value tag="minput_frequency" value="1|1,'root.freq'"/>
              </param>
              <param key="minput_stress_src">
                <value tag="minput_stress_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_stress">
                <value tag="minput_stress" value="9|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="minput_strainreferencetemperature_src">
                <value tag="minput_strainreferencetemperature_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_strainreferencetemperature">
                <value tag="minput_strainreferencetemperature" value="1|1,'0'"/>
              </param>
              <param key="minput_concentration_src">
                <value tag="minput_concentration_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_concentration">
                <value tag="minput_concentration" value="1|1,'0'"/>
              </param>
              <param key="minput_numberdensity_src">
                <value tag="minput_numberdensity_src" value="1|1,'userdef'"/>
              </param>
              <param key="minput_numberdensity">
                <value tag="minput_numberdensity" value="1|1,'0'"/>
              </param>
              <param key="RefPressureCheck">
                <value tag="RefPressureCheck" value="1|1,'1'"/>
              </param>
              <param key="pref">
                <value tag="pref" value="1|1,'1[atm]'"/>
              </param>
              <param key="editModelInputs">
                <value tag="editModelInputs" value="1|1,'0'"/>
              </param>
              <param key="StudyStep">
                <value tag="StudyStep" value="1|1,'std1/stat'"/>
              </param>
              <feature model="/" appl="//@physics/@physints[key='solid']/@value">
                <features key="iss1">
                  <value tag="iss1" entityName="Initial Stress and Strain 1" entityComments="" entityAuthor="" entityCreationTime="1409161840647" applfeatureID="InitialStressandStrain" applmode="//@physics/@physints[key='solid']/@value" edim="2">
                    <tags tag="DomainType" values="1,'ACTIVE'"/>
                    <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1409161840647" selType="geomdim" geom="//@geom/@geoms[key='geom1']/@value" domains="10,3,5" dim="2" hDim="2"/>
                    <param key="Sil">
                      <value tag="Sil" value="9|1,'1e9'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
                    </param>
                    <param key="eil">
                      <value tag="eil" value="9|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
                    </param>
                    <param key="coordinateSystem">
                      <value tag="coordinateSystem" value="1|1,'GlobalSystem'"/>
                    </param>
                    <param key="StudyStep">
                      <value tag="StudyStep" value="1|1,'std1/stat'"/>
                    </param>
                    <feature model="/" appl="//@physics/@physints[key='solid']/@value"/>
                    <featureInfo model="/">
                      <objects key="info">
                        <value tag="info" entityName="Equation View" entityComments="" entityAuthor="" entityCreationTime="1409161840648">
                          <entityFlags>noremove</entityFlags>
                          <entityFlags>nodeactivate</entityFlags>
                        </value>
                      </objects>
                    </featureInfo>
                  </value>
                </features>
                <features key="iss2">
                  <value tag="iss2" entityName="Initial Stress and Strain 2" entityComments="" entityAuthor="" entityCreationTime="1409162001524" applfeatureID="InitialStressandStrain" applmode="//@physics/@physints[key='solid']/@value" edim="2">
                    <tags tag="DomainType" values="1,'ACTIVE'"/>
                    <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1409162001524" selType="geomdim" geom="//@geom/@geoms[key='geom1']/@value" domains="10,4" dim="2" hDim="2"/>
                    <param key="Sil">
                      <value tag="Sil" value="9|1,'207E6'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
                    </param>
                    <param key="eil">
                      <value tag="eil" value="9|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'|1,'0'"/>
                    </param>
                    <param key="coordinateSystem">
                      <value tag="coordinateSystem" value="1|1,'GlobalSystem'"/>
                    </param>
                    <param key="StudyStep">
                      <value tag="StudyStep" value="1|1,'std1/stat'"/>
                    </param>
                    <feature model="/" appl="//@physics/@physints[key='solid']/@value"/>
                    <featureInfo model="/">
                      <objects key="info">
                        <value tag="info" entityName="Equation View" entityComments="" entityAuthor="" entityCreationTime="1409162001525">
                          <entityFlags>noremove</entityFlags>
                          <entityFlags>nodeactivate</entityFlags>
                        </value>
                      </objects>
                    </featureInfo>
                  </value>
                </features>
              </feature>
              <featureInfo model="/">
                <objects key="info">
                  <value tag="info" entityName="Equation View" entityComments="" entityAuthor="" entityCreationTime="1408457101457">
                    <entityFlags>noremove</entityFlags>
                    <entityFlags>nodeactivate</entityFlags>
                  </value>
                </objects>
              </featureInfo>
            </value>
          </features>
          <features key="free1">
            <value tag="free1" entityName="Free 1" entityComments="" entityAuthor="" entityCreationTime="1408457101458" applfeatureID="Free" applmode="//@physics/@physints[key='solid']/@value" edim="1" default="true">
              <tags tag="DomainType" values="1,'EXTERIOR'"/>
              <entityFlags>noremove</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408457101459" selType="geomdim" locked="true" geom="//@geom/@geoms[key='geom1']/@value" allgeom="true" dim="1" hDim="1"/>
              <param key="StudyStep">
                <value tag="StudyStep" value="1|1,'std1/stat'"/>
              </param>
              <feature model="/" appl="//@physics/@physints[key='solid']/@value"/>
              <featureInfo model="/">
                <objects key="info">
                  <value tag="info" entityName="Equation View" entityComments="" entityAuthor="" entityCreationTime="1408457101459">
                    <entityFlags>noremove</entityFlags>
                    <entityFlags>nodeactivate</entityFlags>
                  </value>
                </objects>
              </featureInfo>
            </value>
          </features>
          <features key="init1">
            <value tag="init1" entityName="Initial Values 1" entityComments="" entityAuthor="" entityCreationTime="1408457101460" applfeatureID="init" applmode="//@physics/@physints[key='solid']/@value" edim="2" default="true">
              <tags tag="DomainType" values="1,'ACTIVE'"/>
              <entityFlags>noremove</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
              <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1408457101461" selType="geomdim" locked="true" geom="//@geom/@geoms[key='geom1']/@value" allgeom="true" dim="2" hDim="2"/>
              <param key="u">
                <value tag="u" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="du/dt">
                <value tag="du/dt" value="3|1,'0'|1,'0'|1,'0'"/>
              </param>
              <param key="coordinateSystem">
                <value tag="coordinateSystem" value="1|1,'GlobalSystem'"/>
              </param>
              <param key="StudyStep">
                <value tag="StudyStep" value="1|1,'std1/stat'"/>
              </param>
              <feature model="/" appl="//@physics/@physints[key='solid']/@value"/>
              <featureInfo model="/">
                <objects key="info">
                  <value tag="info" entityName="Equation View" entityComments="" entityAuthor="" entityCreationTime="1408457101460">
                    <entityFlags>noremove</entityFlags>
                    <entityFlags>nodeactivate</entityFlags>
                  </value>
                </objects>
              </featureInfo>
            </value>
          </features>
          <features key="fix1">
            <value tag="fix1" entityName="Fixed Constraint 1" entityComments="" entityAuthor="" entityCreationTime="1409161815156" applfeatureID="Fixed" applmode="//@physics/@physints[key='solid']/@value" edim="1">
              <tags tag="DomainType" values="3,'EXTERIOR','INTERIOR','PAIR'"/>
              <selection entityName="Selection" entityComments="" entityAuthor="" entityCreationTime="1409161815171" selType="geomdim" geom="//@geom/@geoms[key='geom1']/@value" domains="33,1,2,13,19,32" dim="1" hDim="1"/>
              <param key="constraintType">
                <value tag="constraintType" value="1|1,'symmetricConstraint'"/>
              </param>
              <param key="weakConstraints">
                <value tag="weakConstraints" value="1|1,'0'"/>
              </param>
              <param key="constraintGroup">
                <value tag="constraintGroup" value="1|1,'default'"/>
              </param>
              <param key="StudyStep">
                <value tag="StudyStep" value="1|1,'std1/stat'"/>
              </param>
              <feature model="/" appl="//@physics/@physints[key='solid']/@value"/>
              <featureInfo model="/">
                <objects key="info">
                  <value tag="info" entityName="Equation View" entityComments="" entityAuthor="" entityCreationTime="1409161815157">
                    <entityFlags>noremove</entityFlags>
                    <entityFlags>nodeactivate</entityFlags>
                  </value>
                </objects>
              </featureInfo>
            </value>
          </features>
        </feature>
        <featureInfo model="/">
          <objects key="info">
            <value tag="info" entityName="Equation View" entityComments="" entityAuthor="" entityCreationTime="1408457101612">
              <entityFlags>noremove</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
            </value>
          </objects>
        </featureInfo>
      </value>
    </physints>
  </physics>
  <sol model="/">
    <solseqs key="sol1">
      <value tag="sol1" entityName="Solver 1" entityComments="" entityAuthor="" entityCreationTime="1409236832537" study="//@study/@objects[key='std1']/@value" paramNames="0" paramVals="" solType="SolverSequence" attachedFlag="true">
        <entityFlags>nodeactivate</entityFlags>
        <solutionnative pName="1,''" solnumDescriptions="1,'1'" analysisType="Stationary" tListReal="0.0" tListImag="0.0" tDescr="Time"/>
        <savePoint tag="savepoint1" study="std1/stat">
          <xmeshnative tag="/savepoint1/xmesh34.mphbin" dofVersion="3" geomsSolvedFor="1,'geom1'"/>
        </savePoint>
        <solutioninfo pNames="0" looplevel="" maxLevels="3" pNamesOuter="0">
          <oldInfo pNames="0" looplevel="" maxLevels="3" pNamesOuter="0" oldAnalysisType="Stationary"/>
        </solutioninfo>
      </value>
    </solseqs>
  </sol>
  <intrule entityName="List" entityComments="" entityAuthor="" entityCreationTime="1409162126703" model="/"/>
  <elem model="/"/>
  <elementset entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101436" model="/"/>
  <hist/>
  <geomManagerNative tag="/geommanager1.mphbin" lastID="9"/>
  <unitsystem model="/"/>
  <coordsys entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101428" model="/">
    <features key="sys1">
      <value xsi:type="com.comsol.mph-v12:Coordsys" tag="sys1" entityName="Boundary System 1" entityComments="" entityAuthor="" entityCreationTime="1408457101428" operationID="Boundary" geom="//@geom/@geoms[key='geom1']/@value">
        <entityFlags>nodeactivate</entityFlags>
        <entityFlags>noremove</entityFlags>
        <properties key="identifier">
          <value tag="identifier" value="sys1"/>
        </properties>
        <properties key="coord">
          <value tag="coord" valueArray="1|3,'t1','n','to'"/>
        </properties>
        <properties key="frametype">
          <value tag="frametype" value="spatial"/>
        </properties>
        <properties key="reversenormal">
          <value tag="reversenormal" value="off"/>
        </properties>
        <properties key="mastercoordsystcomp">
          <value tag="mastercoordsystcomp" value="3"/>
        </properties>
        <properties key="tangent">
          <value tag="tangent" valueArray="1|2,'root.t1x','root.t1y'"/>
        </properties>
        <properties key="mastersystem">
          <value tag="mastersystem" value="globalCartesianSpatial" referenceContainerList="//@coordsys" compositeIndex="0"/>
        </properties>
        <feature xsi:type="com.comsol.mph-v12:CoordsysList" model="/"/>
        <featureInfo model="/">
          <objects key="info">
            <value tag="info" entityName="Equation View" entityComments="" entityAuthor="" entityCreationTime="1408457101444">
              <entityFlags>noremove</entityFlags>
              <entityFlags>nodeactivate</entityFlags>
            </value>
          </objects>
        </featureInfo>
      </value>
    </features>
  </coordsys>
  <pair entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101436" model="/"/>
  <capeopen entityName="CAPE-OPEN" entityComments="" entityAuthor="" entityCreationTime="1408455591009">
    <entityFlags>nodeactivate</entityFlags>
    <entityFlags>noremove</entityFlags>
    <feature model="/"/>
  </capeopen>
  <probe entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408455590369" model="/"/>
  <ode entityName="List" entityComments="" entityAuthor="" entityCreationTime="1408457101436" model="/"/>
  <file model="/"/>
  <event entityName="List" entityComments="" entityAuthor="" entityCreationTime="1409162128691" model="/"/>
  <group entityName="Load and Constraint Groups" entityComments="" entityAuthor="" entityCreationTime="1408455591007" model="/"/>
  <extraDim entityName="List" entityComments="" entityAuthor="" entityCreationTime="1409162128277" model="/"/>
</com.comsol.mph-v12:Model>
