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Capacitive Micromotor

Application ID: 17235

This tutorial shows how to model a 2D capacitive micromotor. The motor consists of a rotor and a stator made of polysilicon. The cogs of the stator are subjected to a time-varying pulsed voltage such that the voltage on adjacent cogs vary by a phase difference of 2p/3. As a result, a time-varying torque acts on the rotor thereby rotating it about its center.

This model shows how to use an electrostatics analysis to solve a quasi-static electrical model of the micromotor. An ODE is used to find the angular displacement by setting up the equation of rotary motion. Furthermore, the angular displacement evaluated is used to prescribe the rotation of the mesh on the rotor and in the adjoining air region to account for the transient motion of the micromotor.