TM Mode Microwave Plasma

Application ID: 16683


This model shows how to simulate a TM mode microwave plasma by using the Doppler broadening parameter to smooth out the resonance zone, which occurs on the contour of critical electron density.

A detailed explanation of the underlying physics of this model can be found in the blog entry "Application Note on Microwave Discharges".

This model example illustrates applications of this type that would nominally be built using the following products:

RFモジュール