TM Mode Microwave Plasma
Application ID: 16683
This model shows how to simulate a TM mode microwave plasma by using the Doppler broadening parameter to smooth out the resonance zone, which occurs on the contour of critical electron density.
A detailed explanation of the underlying physics of this model can be found in the blog entry "Application Note on Microwave Discharges".
This model is included as an example in the following products:RFモジュール
however additional products may be needed to reproduce it. This example may be created and run using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the 製品仕様一覧 and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.