Coupled Electromagnetic - Dynamic FEM Simulation of A High Frequency MEMS Energy Harvester

E. Topal
Middle East Technical University
Ankara
Turkey
Published in 2011

In this study, a detailed finite element model coupling the motion dynamics and electromagnetics of a diaphragm based MEMS vibration energy harvester is presented. The energy harvester converts low frequency vibrations to high frequency response by magnetic actuation of a diaphragm carrying coils.

AC/DC, Solid Mechanics and Moving Mesh (ALE) modules are coupled together in one 3-D model to analyze the performance of the MEMS vibration energy harvester. A peak-to-peak voltage of 7mV and a peak electrical power of 1.4 µW can be generated from the electromagnetic device having a volume of roughly 0.25 cm3.

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