Modal Analysis of Microcantilever Response to Sine Wave Excitation Using Vibrational Speaker

M. Satthiyaraju [1], T. Ramesh [1],
[1] National Institute of Technology, Tiruchirappalli, Tamil Nadu, India
Published in 2016

The dynamic response of microcantilever, which is a simple microelectromechanical system (MEMS) structure, to sine wave excitation is studied using the vibrational speaker set up in the atmospheric damping. Microcantilever is fabricated using micro wire cut EDM process for high precision. Mostly silicon material is used for microsystems based structure. Here stainless steel was used and machined for fabricating the microcantilevers. In this study, the mode shapes and corresponding natural frequencies have been formulated in experimental analysis. These Eigen frequencies and mode shape values have been compared with the results of numerical simulation values using COMSOL Multiphysics® software. In addition to that the microcantilever with various profiles can be analyzed to improve the sensitivity of the microcantilever for various applications.