Parametric Simulation of PZT Diameter to Hole Ratio for Optimized Membrane Displacement

A. Arevalo [1], D. Castro [1], D. Conchouso [1], I. G. Foulds [2]
[1] Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Saudi Arabia
[2] The University of British Columbia, School of Engineering, Okanagan Campus, Saudi Arabia

For our simulation we used the Piezoelectric Devices interface. The structure was set with (clamped) fix constraint boundaries to both ends. The bottom electrode was set to be the ground for the electrostatic physics and the top electrode was set to be a Terminal with potential of 10V. A parametric sweep study was set to change the geometry, the parameters to change was the hole diameter (Holed) and the piezoelectric stack layer (PZTd).