COMSOL Conference 2013

MEMS and Nanotechnology

MEMS and Nanotechnology applications such a piezoresistors, biosensors, optical switches, and electrostrictive energy harvesters naturally require a multiphysics approach to simulation. Read the papers, presentations, and posters on this page featuring multiphysics models of MEMS and Nanoscale devices from the COMSOL Conference.

Air Damping of Oscillating MEMS Structures: Modeling and Comparison with Experiment

S. Gorelick, M. Leivo, U. Kantojärvi

VTT Technical Research Centre of Finland, Espoo, Finland

Sensitivity Analysis of Different Models of Piezoresistive Micro Pressure Sensors

S. Meenatchisundaram1, S. M. Kulkarni2, S. Bhat

1Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal, Karnataka, India.
2Department of Mechanical Engineering, National Institute of Technology, Surathkal, Karnataka, India.

Modeling and Analysis of Thermal Bimorph using COMSOL Multiphysics®

Rachita Shettar, Dr. B G. Sheparamatti

Basaveshwar Engineering College, Bagalkot, Karanataka, India

Tunable MEMS Capacitor for RF Applications

H. S. Shriram, T. Nimje, D. Vakharia

BITS Pilani, Rajasthan, India

Modeling and Simulation of Piezoelectric Materials for Comparison to Experimental Data

E. Nesvijski1,2, R. Sahul2

1Western New England College, Springfield, MA, USA
2TRS Technologies, State College, PA, USA

Dynamic Characterization and Mechanical Simulation of Cantilevers for Electromechanical Vibration Energy Harvesting

N. Alcheick, H. Nesser, H. Debeda, C. Ayela, I. Dufour

Univ. Bordeaux, IMS Lab, Pessac, France

Design and Simulation of 3D MEMS Piezoelectric Gyroscope using COMSOL Multiphysics®

T.Madhuranath, R.Praharsha, Dr.K.Srinivasa Rao

Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India

Simulation of ZnO Enhanced SAW Gas Sensor

H. du Plessis, W. Perold

University of Stellenbosch, Stellenbosch, South Africa

Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications

A. Arevalo, I.G. Foulds

King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia

Fluid-structure Interaction Modeling of Air Bearing

H.R. Javani1, P. Kagan2, F. Huizinga1

1ASML - MDev – Mechanical analysis, Veldhoven, The Netherlands
2ASML - MDev – System Dynamics, Veldhoven, The Netherlands

Sensitivity Optimization of Microfluidic Capacitance Sensors

S. Satti, M. Baghini

Indian Institute of Technology Bombay, Mumbai, Maharashtra, India

Modeling Drug Release from Materials Based on Electrospun Nanofibers

P. Nakielski, T. Kowalczyk, T.A. Kowalewski

Institute of Fundamental Technological Research Polish Academy of Sciences, Warsaw, Poland

Electrohydrodynamic Micropump Modeling for Performance Optimization

A. Mulye1, S. Potnis2

1Northeastern University, Boston, MA, USA
2VIT, Mumbai, Maharashtra, India

Modeling of MEMS Based Bolometer for Measuring Radiations from Nuclear Power Plant

S. Nisitha1, T. Satyanarayana2, S. Sreeja1

1Department of EIE, Lakireddy Bali Reddy Engineering College, Mylavaram, Andhra Pradesh, India.
2NPMASS Centre, Department of EIE, Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra
Pradesh, India

Design of MEMS-based Microcantilever for Tuberculosis Detection

Saranya K, Saranya R, Ceemati D, Chandra Devi K, Meenakshi Sundaram N

PSG College of Technology, Coimbatore, Tamil Nadu, India

Modeling and Simulation of Silicon Optical MEMS Switches Controlled by Electrostatic Field

J. Golebiowski, S. Milcarz

Technical University of Lodz, Poland

Degeneracy Breaking, Modal Symmetry and MEMS Biosensors

H.T.D. Grigg, T.H. Hanley, B.J. Gallacher

Newcastle University, Newcastle upon Tyne, United Kingdom

Modeling and Simulation of the Rapid and Automated Measurement of Biofuel Blending in a Microfluidic Device under Pressure Driven Flow using COMSOL Multiphysics®

Sanket Goel1, Venkateswaran PS1, Rahul Prajesh2, Ajay Agarwal2

1University of Petroleum & Energy Studies, Bidholi, Prem Nagar, Dehradun, India
2CSIR - Central Electronics Engineering Research Institute,(CSIR-CEERI) Pilani, India

Simulation of Cantilever Based Sensors for Smart Textile Applications

S. Mano, S. Sowmya, Jaisree Meenaa Pria K N J, M. N. Sundaram, C. D. Koman

PSG College of Technology, Coimbatore, Tamil Nadu, India

Design and Optimization of Electrostatically Actuated Micromirror

Anna Thomas1, Juny Thomas1, Deepika Vijayan1, K.Govardhan2

1VIT University, Sensor System Technology, School of Electronics Engineering, Vellore, Tamil Nadu, India
2VIT University, MEMS & Sensor Division, School of Electronics Engineering, Vellore, Tamil Nadu, India

Demonstration of All-Optical NAND Logic Gate Using Photonic Integrated Circuits

J. T. Andrews, R. Choubey, O P Choudhary, N. Malviya, A. Patel, M. Kumar, S. Chouksey, J. Solanki

National MEMS Design Center, Department of Applied Physics, Shri G S Institute of Technology & Science, Indore 452003 MP, India

Finite Element Analysis of BAW Sensor

M. Hashiguchi, Y. Sumiyoshi

Keisoku Engineering System Co., Ltd., Tokyo, Japan

Design of Pressure Measuring Cells Using the Unified Material Law

P. Aguirre, F. Figueroa

Sensor Technik Wiedemann GmbH, Kaufbeuren, Bayern, Germany

Multiphysics Simulation of a Self-heating Paraffin Membrane Microactuator

P. Lazarou, C. Rotinat

CEA LIST/DIASI/LRI, Paris, France

Development of MEMS-based Pressure Sensor for Underwater Applications

Aarthi E, Pon Janani S, Vaidevi S, Meenakshi Sundaram N , Chandra Devi K

PSG College of Technology, Coimbatore, Tamil Nadu, India

Design and Simulation of Piezoelectric Vibration Energy Harvesters of Various Shapes using COMSOL Multiphysics®

Priya Chhabra1, Arjun Shetty2

1Electronic Science Department , Kurukshetra University, Kurukshetra, Haryana, India
2Electrical Communication Engineering, Indian Institute of Science, Bangalore, Karnataka, India

A Computational Approach for Simulating p-Type Silicon Piezoresistor Using Four Point Bending Setup

T.H. Tan1, S.J.N. Mitchell1, D.W. McNeill1, H. Wadsworth2, S. Strahan2

1Queen's University Belfast, Belfast, United Kingdom
2Schrader Electronics Ltd, Antrim, United Kingdom

Harmonic Simulation of Viscoelastic Polymer Microcantilever for Electrostrictive Energy Harvesters

N. Alcheikh, C. Ayela, I. Dufour

Univ. Bordeaux, IMS Lab, Pessac, France.

COMSOL Multiphysics® Simulation Integrated into Genetic Optimization

V. Longinotti1, S. Di Marco1, S. Pistilli1, F. Costa1, M. Giusti1, G. Gammariello1, I. Gison1, G. Latessa1,2, D. Mascolo2, A. Buosciolo1

1Altran Italia, Roma, Italy
2Consorzio DeltaTi Research, Milano, Italy

Looking for the Origin of Power Laws in Electric Field Assisted Tunneling

H. Cabrera, D.A. Zanin, L.G. De Pietro, A. Vindigni, U. Ramsperger, D. Pescia

Laboratory for Solid State Physics, ETH Zurich, Zurich, Switzerland

Actively Controlled Ionic Current Gating In Nanopores

G. Zhang, S. Bearden

Clemson University, Clemson, SC, USA

Effective Mass Calculations Using COMSOL Multiphysics® for Thermomechanical Calibration

B. D. Hauer, C. Doolin, K. S. D. Beach, J. P. Davis

University of Alberta, Edmonton, AB, Canada

Surface Acoustic Wave Ferroelectric Phononic Crystal Based on Electric Field Induced Periodic Domains

V. Pashchenko1, S. Yankin2

1Saint Petersburg State Polytechnical University, Saint Petersburg, Russia
2State University, Saratov, Russia. Joint International Laboratory LICS/LEMAC, IEMN UMR CNRS 8520, EC Lille, Villeneuve d'Ascq, France

Metal MEMS Membrane Based Electric Field Sensor

E. Tahmasebian, C. Shafai, T. Chen

University of Manitoba, Winnipeg, MB, Canada

Tunable MEMS Capacitor for mm and μm Wave Generation

Arpita Das, Amrita Nandy, Sakuntala Mahapatra, Sk. Mohammed Ali, Minu samantary

National MEMS design centre ,Department of Electronics and Telecommunication, Trident Academy of Technology, Biju Pattnaik University of Technology , India

Surface Acoustic Wave Scattering Matrix Evaluation Using COMSOL Multiphysics®: Application to Surface Acoustic Wave Transmission Through 2D Surface Phononic Crystal

S. Yankin[1,2], A. Talbi, V. Preobrazhensky[1,3], P. Pernod, O. Bou Matar, A. Pavlova

1 Joint International Laboratory LICS/LEMAC, IEMN UMR CNRS 8520, EC Lille, Villeneuve d'Ascq, France
2 Saratov State University, Saratov, Russia
3 Wave Research Center, Russian Academy of Sciences, Moscow, Russia

Simulation and Performance Analysis of Nanowire Design with Different Variants

Boopathi S, Ms.E.Malar, Deepan Chakravarthi P

Department of Biomedical Engineering, PSG College of Technology, Coimbatore, Tamil Nadu, India

MEMS-based Handy Fuel Adulteration Detection Device

Anumeha Dwivedi1, Dr. R. Dey2

1BITS Pilani K.K. Birla Goa Campus, Goa, India
2Associate Professor, BITS Pilani K.K. Birla Goa Campus, Goa, India

Design and Optimization of Highly Sensitive Single Axis Accelerometer using COMSOL Multiphysics®

Kunal A.Kshirsagar, K.Govardhan,

1VIT University, Sensor System Technology, School of Electronics Engineering, Vellore, Tamil Nadu, India
2VIT University, MEMS & Sensor Division, School of Electronics Engineering, Vellore, Tamil Nadu, India

Analyte Capture from Liquid Samples: Size Matters

M. Weber, M. Reed

Yale University, New Haven, CT, USA

Understanding the Role of Nanomaterials in DNA Biosensors Through Finite Element Analysis

J. C. Kumaradas1, A. Zhang2, Y. D. Davletshin1

1Ryerson University, Toronto, ON, Canada
2University of Waterloo, Waterloo, ON, Canada

Novel Simulation of a Voltage-Driven Electro-Thermo-Mechanical MEMS Self-Oscillator

S. Ouenzerfi 1,2,3, H.A.C. Tilmans 2, S. El-Borgi3,4, X. Rottenberg 2

1 KACST-Intel Consortium Center of Excellence in Nano-manufacturing Applications (CENA), Riyadh, KSA
2 IMEC, Leuven, Belgium
3 Applied Mechanics and Systems Research Laboratory, Tunisia Polytechnic School, University of Carthage, La Marsa, Tunesia
4 Texas A&M University at Qatar, Mechanical Engineering Program, Engineering Building, Doha, Qatar

Surface Acoustic Wave Properties (SAW) and Acoustic Streaming Characterization for Annular and Curved Electrodes on 128˚ Y-Cut, X-Propagating LiNbO3

G. Potter, N. Tokranova, S. Gattu, J. Castracane

SUNY College of Nanoscale Science and Engineering, Albany, NY, USA

Development of Stress Relief Suspensions for Micro-Machined Silicon Membranes

W. Kronast, U. Mescheder, B. Müller

Hochschule Furtwangen, Furtwangen, Germany

Efficient Anchor Design for Quality Factor Enhancement in a Silicon Nitride-on-Silicon Lateral Bulk Mode Resonator

U. Rawat, A. DasGupta, D. R. Nair, V. V. Pasula

Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai, Tamil Nadu, India

Time Dependent Simulations of Thermoelectric Thin Films and Nanowires for Direct Determination of their Efficiency with COMSOL Multiphysics®

M. Muñoz Rojo1, J. Jose Romero1, D. Ramos1, D. Borca-Tasciuc2, T. Borca-Tasciuc2, M. Martín Gonzalez1

1Instituto de Microelectrónica de Madrid, Madrid, Spain
2Rensselaer Polytechnique Institute, Troy, New York, USA

Empirical Model Dedicated to the Sensitivity Study of Acoustic Hydrogen Gas Sensors Using COMSOL Multiphysics®

A. Ndieguene1, I. Kerroum1, F. Domingue1, A. Reinhardt2

1Laboratoire des Microsystèmes et de Télécommunications/Université du Québec à Trois-Rivières, Trois-Rivières, QC, Canada
2Laboratoire d’Électronique et des Technologies de l’Information, CEA, LETI Grenoble, France

Proof of Concept and Properties of Micro Hydraulic Displacement Amplifier

R. Zhu1, A. Malisauskaite1, U. Mescheder 1, U. Wallrabe2

1Hochschule Furtwangen University, Furtwangen, Baden-Württemberg,Germany
2Institut für Mikrosystemtechnik (IMTEK), Freiburg, Baden-Württemberg, Germany

3D-Modeling of Magnetophoretic Separation of Superparamagnetic Dispersions Using COMSOL Multiphysics® Particle Tracing Module

D. Kleinehanding, L. Teich, C. Schröder

Department of Engineering Sciences and Mathematics, Computational Materials Science & Engineering (CMSE), University of Applied Sciences Bielefeld, Bielefeld, Germany

Design and Simulation of MEMS-based Sensor for Artificial Hand

P. Prema, Sakthivishnu.R, Sowmya. R, Chandra Devi K, Meenakshi Sundaram. N

PSG College of Technology, Coimbatore, Tamil Nadu, India

Design and Analysis of a Wetting Lens for the Pinhole Cameras of a Two Phase Flow System

A. K. Reddy, T. Satyanarayana

Lakireddy Balireddy Autonomous College of Engineering, Mylavaram, A.P., India

Design and Simulation of MEMS-based Piezoelectric Accelerometer

Siram Sai Krishna1, Nuti Venkata Subrahmanya Ayyappa Sai1, Dr.K.Srinivasa Rao2

1Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
2Professor & HOD, Dept. of Electronics and Instrumentation Engineering, Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India

Void Shape Evolution of Silicon Simulation in COMSOL Multiphysics®

C. Grau Turuelo, B. Bergmann, C. Breitkopf

Technische Universität Dresden, Dresden, Germany

Design Optimization of Piezoelectric Micro-machined Modal Gyroscope

Shambhu Singh, Dr. N N Sharma

Birla Institute of Technology and science, Pilani, Rajasthan, India

Multiphysics Modelling and Simulation of Implantable Wireless MEMS Capacitive Sensor for Cardiovascular Diagnostics

R.Yogeswari, S.Venkateshwaran , K.Umapathi

United Institute of Technology,Coimbatore,Tamil Nadu, India

Resonant Frequency Analysis of Quartz Shear Oscillator

T. Satyanarayana1, V. Sai Pavan Rajesh2

1NPMASS Centre, Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India
2Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India

Design of a MEMS Resonator for a Centre Frequency Greater than 26.35 MHz and Temperature Coefficient Frequency Less than 0.5 ppm

S.Manikandan, R.Radeep krishna

Kalasalingam University, Department of ECE, Srivilliputtur ,Krishnan koil, Tamil Nadu, India

Finite Element Evaluation of Surface Acoustic Wave Reflection and Scattering from Topographic Irregularities Comparable with the Wavelength

S. Yankin1,2, S. Suchkov2, S. Nikitov2,3, B. Sveshnikov2, I. Shatrova 2

1Joint International Laboratory LICS/LEMAC, IEMN UMR CNRS 8520, EC Lille,Villeneuve d’Ascq, France
2Saratov State University, Saratov, Russia
3Institute of Radio-engineering and Electronics, Russian academy of Science, Moscow, Russia

Modeling Partially Absorbing Biosensors

D. Kappe, A. Hütten

Bielefeld University, Bielefeld, Germany

Two-axis Analysis of Micromirror Using Electrothermal Actuators For Optical Switching Applications

B.Bharanipriyaa, V.S.Selvakumar, L. Sujatha

National MEMS Design Center, Rajalakshmi Engineering College, Thandalam, Chennai,Tamil Nadu, India

COMSOL Multiphysics for the Designs and Applications on Biomicrofluidic Chips

I-Fang Cheng

National Nano Device Laboratories (NDL), National Applied Research Laboratories, Taipei, Taiwan

COMSOL Multiphysics Applied to MEMS Simulation and Design

Dr. Piotr Kropelnicki

Mu Xiao Jing Wan Chia Ang Cai Hong Andrew B. Randles Institute of Microelectronics, Agency for Science, Technology and Research, Singapore, Singapore


ISBN: 978-0-9910001-5-9
ISSN: 2372-2215