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MEMS DISC resonator
Posted 2011/05/02 6:48 GMT-4 0 Replies
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I build the Disc resonator with dimensions of radius of DISC is 17um, its thickness is 2um and gap between the disc to electrodes is 1000 Angstroms , done Eigen frequency Analysis for this model i used the same material which they are mentioned in the published IEEE paper my Questions are
1) I am not getting the exact results with 100 times less compare to paper, they got eigen frequency 160MHz but for my self it is 1.68MHz i did exactly same as they mentioned i don't know where is the problem ?
2)I used the electrostatics(es) physics for this model is this enough or i have to use some other physics to get the correct results?
3) And unable to find out the Quality factor for this model (please provide, if is there any procedure ?)
4) Presently i don't have the license for the RF module is it required for finding the Quality factor or can i do it with MEMS module
if any body knows the answers please help me ........
thanks in advance .........
Hello Sri Kanth
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