アプリケーションギャラリ

The COMSOL^® software includes capabilities for 3D plasma modeling. In this example, a square coil is placed on top of a dielectric window and is electrically excited at 13.56 MHz. A plasma is formed in the chamber beneath the dielectric window, which contains argon gas at low pressure (20 mtorr). The gas flows into the process chamber from two 2-inch ports and the gas is extracted through a single 4-inch port. The plasma is sustained via electromagnetic induction where power is transferred from the electromagnetic fields to the electrons.