アプリケーションギャラリ

This tutorial model solves for an inductively coupled plasma reactor in a mixture of argon/oxygen. The model computes the fluid flow and gas heating. Important aspects and strategies for modeling electronegative discharges are discussed. 詳細を見る

Plasma discharges containing chlorine are commonly used to etch semiconductors and metals in microelectronics fabrication. This tutorial model studies chlorine plasma discharges using a global (volume-averaged) diffusion model. Global diffusion models can run simulations in a fraction ... 詳細を見る

This model analyzed the ALD deposition process of alumina film on the surface of a U-shaped structure. In this process, gaseous precursors are sequentially introduced to the reaction chamber and sequentially undergo a series of adsorption and chemical reactions on the surface. The ... 詳細を見る

膜, 板, 固体などの構造物と結合した液体または気体の音響は, 多くの工学分野において重要な応用分野です. このモデルは, 固体物体と結合した3次元の音響流体現象を一般的に実証するものです. 固体物体の壁は音圧の影響を受けます. 固体からの周波数応答が計算され, 音響領域にフィードバックされることで波形を解析できます. したがって, このモデルは散乱問題の好例となります. 詳細を見る

This model solves the Boltzmann equation in the two-term approximation for a background of molecular and atomic hydrogen. Electron mobility and source terms are computed by suitable integration of the electron energy distribution function over electron impact cross sections. 詳細を見る

Capacitively coupled RF discharges can operate in two distinct regimes depending on the discharge power. In the low power regime, known as the alpha regime, the electric field oscillation is responsible to heat and create electrons. In the high power regime, known as gamma regime, the ... 詳細を見る

In this tutorial, the heat and mass transport equations are coupled to laminar flow in order to model exothermic reactions in a parallel plate reactor. It exemplifies how you can use COMSOL Multiphysics to systematically set up and solve increasingly sophisticated models using predefined ... 詳細を見る

Carbon deposition on the surface of solid catalysts is commonly observed in hydrocarbon processing. A known problem is that carbon deposits can impede the activity of catalysts as well as block the flow of gas through a catalyst bed. This example investigates the thermal decomposition ... 詳細を見る

This model investigates the National Institute of Standards and Technology (NIST) Gaseous Electronics Conference (GEC) reference cell in two dimensions using the Plasma, Time Periodic interface. A 2D example helps in understanding the physics without excessive CPU time. The cell is ... 詳細を見る

Metal hydride tanks offer safe hydrogen storage, thanks to their low reactivity, and a relatively high hydrogen density. When developing metal hydride hydrogen tank designs, modeling and simulation is useful for optimizing operating conditions, such as gas composition, pressure, and ... 詳細を見る