アプリケーションギャラリには電気, 構造, 音響, 流体, 熱および化学分野に関連する COMSOL Multiphysics® チュートリアルおよびデモアプリファイルが用意されています. これらの例はチュートリアルモデルまたはデモアプリファイルとそれに付随する手順をダウンロードすることにより独自のシミュレーション作業の開始点として使用できます.
クイック検索機能を使用して専門分野に関連するチュートリアルやアプリを検索します. MPHファイルをダウンロードするには, ログインするか, 有効な COMSOL ライセンスに関連付けられている COMSOL Access アカウントを作成します. ここで取り上げた例の多くは COMSOL Multiphysics® ソフトウェアに組み込まれ ファイルメニューから利用できるアプリケーションライブラリからもアクセスできることに注意してください.
This model investigates the National Institute of Standards and Technology (NIST) Gaseous Electronics Conference (GEC) reference cell in two dimensions using the Plasma, Time Periodic interface. A 2D example helps in understanding the physics without excessive CPU time. The cell is ... 詳細を見る
Capacitively coupled RF discharges can operate in two distinct regimes depending on the discharge power. In the low power regime, known as the alpha regime, the electric field oscillation is responsible to heat and create electrons. In the high power regime, known as gamma regime, the ... 詳細を見る
This tutorial studies the etching of silicon using an inductively coupled plasma reactor with an RF bias in a mixture of CF4/O2. The etching rate is computed along the wafer as a function of the RF bias voltage. 詳細を見る
This tutorial model presents a study showing the transient negative mobility and the negative differential conductivity effects in xenon. The stationary and time dependent Boltzmann equation in the two-term approximation is used to compute the electron energy distribution function. ... 詳細を見る
This tutorial model demonstrates how to compute the impedance of a capacitively coupled plasma. The Time Periodic study computes the time periodic solution of the plasma. Subsequently, the solution is transformed to the time domain, after which the fast Fourier transform (FFT) solver is ... 詳細を見る
In this model, we show how to model Seebeck effect which works as a thermoelectric generator. Seebeck effect is a phenomena where the difference in temperature of a material leads to a potential difference. The potential drawn in this model was compared with the paper by Jaegle (Example ... 詳細を見る
In this example, an SF6/argon plasma reactor at moderate pressure is studied using a global model. The heavy species heat equation is included. Parametric sweeps for input power and argon mole fraction are computed. 詳細を見る
This model solves the Boltzmann equation in the two-term approximation for a background of molecular and atomic hydrogen. Electron mobility and source terms are computed by suitable integration of the electron energy distribution function over electron impact cross sections. 詳細を見る
In this example, a hydrogen plasma reactor at moderate pressure is studied using a global model. The heavy species heat equation is included. In the first part of the study, a Maxwellian electron energy distribution function is used. In the second part, the global model is solved self ... 詳細を見る
The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes. 詳細を見る
