アプリケーションギャラリ

このチュートリアルでは, パラメーター推定機能を用いて MEMS 共振器の電気回路モデルを導出する方法を説明します. このモデルは, 電気回路インターフェースを用いて作成された修正 Butterworth-Van Dyke 回路であり, 薄膜バルク音響共振器 (FBAR) を表しています. パラメーター推定スタディを用いて, モデル内の集中定数素子のパラメーターを解析しました. 詳細を見る

Surface micromachined thin films are often subject to residual stress. This COMSOL Multiphysics example describes a thin film resonator with straight or folded cantilever beam springs. The resonance frequencies of the resonator are affected by thermal stress. Using folded springs ... 詳細を見る

This models pressure-dependent heating of 4 inch wafer on unipolar electrostatic chuck. Wafer sits on top of ring with electrostatic force holdong down wafer to counter upward pressure from gas flowing in gap between wafer and chuck surface. It is a problem involving 4 coupled physics ... 詳細を見る

In this tutorial, the vibrational behavior of a small aluminum plate with four waveguide structures is analyzed. This is an example of a structural component located in a device where elastic waves are propagating, like a smart speaker, an electric motor, or a MEMS device. The plate can ... 詳細を見る

This model analyzes the operation of a micromirror in air and the effects of thermoviscous damping on the vibration response. The model includes thermal losses in the structure as well as thermoviscous acoustic phenomena. The model couples the Thermoelasticity multiphysics interface to ... 詳細を見る

This model shows how to analyze a simple, cantilever based, piezoelectric energy harvester. A sinusoidal acceleration is applied to the energy harvester and the output power is evaluated as a function of frequency, load impedance and acceleration magnitude. 詳細を見る

This model shows how to create dispersion diagrams from simulation results by extending the tutorial Thin-Film BAW Composite Resonator. The dispersion curve can be plotted against both real and imaginary values of the wave number, corresponding to the propagating modes and evanescent ... 詳細を見る

This tutorial example is kindly provided by Dr. James Ransley at Veryst Engineering, LLC. This model continues from the base model “A Micromachined Comb-Drive Tuning Fork Rate Gyroscope”, which is also provided by Dr. Ransley. The model demonstrates how to accurately compute the effects ... 詳細を見る

Many piezoelectric materials are ferroelectric. Ferroelectric materials exhibit nonlinear polarization behavior, such as hysteresis and saturation at large applied electric fields. In addition, the polarization and mechanical deformations in such materials can be strongly coupled due to ... 詳細を見る

This model analyzes the thermal expansion in a MEMS device, such as a microgyroscope, where thermal expansion should be minimized. The device is made from the copper-beryllium alloy UNS C17500 and uses temperature-dependent material properties from the Material Library. The purpose of ... 詳細を見る