CMUT Based Free Membrane Intra-Cardiac Volumetric Blood Flow-Meter

P. Priya [1], B. D. Pant [2],
[1] Birla Institute of Technology and Science Pilani, Pilani, Rajasthan, India
[2] CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India
Published in 2015

In this paper, a free membrane is used as a receiver to increase the capacitance and therefore the resolution of the flow meter. For the current application, from the wavelength of sound wave in soft tissue (c= 1540 m/s) the resolution was calculated to be 0.48 mm. This gives the first Eigen frequency of the capacitive structure according to which the poly silicon membrane was designed. After applying the bias, kinetic and dynamic study was carried out. Acoustic coupling gives the receiver mode. Changes were made to the dimensions to increase the resolution for the same fundamental frequency. The percentage increase in capacitance in the free membrane was calculated.

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