See How Multiphysics Simulation Is Used in Research and Development

Engineers, researchers, and scientists across industries use multiphysics simulation to research and develop innovative product designs and processes. Find inspiration in technical papers and presentations they have presented at the COMSOL Conference. Browse the selection below or use the Quick Search tool to find a specific presentation or filter by application area.
View the COMSOL Conference 2018 Collection
2007 - Grenoblex

Parameter Extraction and Support-Loss in MEMS Resonators

Peter Steeneken
Project Leader
RF MEMS Research Group
NXP Semiconductors
Eindhoven, The Netherlands

In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary ... 詳細を見る