技術情報とプレゼンテーション

Damping is the liminting factor for the reachable maximum deflection. Thus, it is a very important issue for resonant microsystems. In this paper, we present a damping model for out-of-plane comb driven resonant micromirrors. The basic concept of this model is to attribute viscous ... 詳細を見る

Introduction In this study, we investigate the damping mechanisms of particle resonances in acoustofluidic systems using the finite element framework of COMSOLTM. In the field of acoustic micro-manipulation, pressure waves are used for the contactless handling of micro-meter sized ... 詳細を見る

The analyzed MEMS oscillator is composed by a spring (beam) supported mass that needs to vibrate with a high Q-factor in the horizontal plane. Nevertheless, the transverse motion needs to be highly damped (low Q-factor). The purpose of the work was to explore different system ... 詳細を見る

Large centrifugal compressors, which are commonly applied in the oil and gas and in the process industry, may fail due to vibrations of the impeller. These vibrations are induced by pressure pulsations in a compressor stage. These vibrations can be especially strong in so-called dense ... 詳細を見る

This paper develops a computational model for determining the total damping coefficient for a unit cell of a MEMS microscale device containing a repetitive pattern of holes. The basic cell of the microstructure is approximated by an axi-symmetric domain and the velocity and pressure ... 詳細を見る

For the purpose of investigation the inertial behaviour of the crystalline lens, the COMSOL Multiphysics® software was used to create a 2D multi-physics model of the porcine eye globe, by using the Fluid-Structure Interaction (FSI). The geometry of the porcine eye model was adapted from ... 詳細を見る

A model for material damping is presented in terms of internal friction and in terms of a variation of stiffness. In the latter case the idea is that the stiffness increases if elastic energy is stored and decreases if elastic energy is released. In case of a single mass spring system ... 詳細を見る

The semiconductor industry is always looking for early anticipation of manufacturing risk, pushing the development of Computer Aided Engineering (CAE) modeling of processes. Robust Chip-Package Interaction requires a deep understanding of thermo-mechanical stresses imposed during the ... 詳細を見る

Viscous damping has a significant effect on dynamic performance of the resonators operating within fluid. This work is aimed to find the viscous damping for MEMS torsional paddle operating in air. Interaction of moving structure with the fluid requires a complicated and challenging ... 詳細を見る

The multilayer composite single mass cantilever is a MEMS energy harvester structure. The vibrating structure is under vacuum in hermetic MEMS. However, out-gassing during process integration and fabrication would cause air molecules (e.g. hydrogen, nitrogen, argon, water vapor, oxygen, ... 詳細を見る