Design and Simulation of an Orbiting Piezoelectric MEMS Gyroscope Based on Detection of Phase-Shift Signals - new
S. Gorelick, J. R. Dekker, B. Guo, H. Rimminen
 VTT Technical Research Centre of Finland, Espoo, Finland
The feasibility of phase-sensitive detection of angular-rates using bi-directional orbiting piezoresonators suspended by thick annular springs with thin-film aluminium nitride piezoactuators on top of them was investigated. The ring-shaped flexures are more suitable for supporting the orbiting motion due to their angle-dependent spring constant. The response of the orbiting resonators to ...
R. W. Pryor ,
 Pryor Knowledge Systems, Inc., Bloomfield Hills, MI, USA
Crack detection is and has been an active field of exploration, both theoretical and applied for a number of years. It is the belief of this author that the concepts presented herein explore a new methodology for the modeling and the detection of cracks and families of cracks in crystalline solids, polycrystalline solids and high viscosity amorphous materials (glasses). In the case of the ...
B. Parvitte, C. Risser, R. Vallon, V. Zéninari
GSMA - Université de Reims, Reims, France
This paper aims to demonstrate the simulation of photoacoustic signals using FEM software. The Acoustics Module of the software COMSOL Multiphysics is used to calculate the response of a differential Helmholtz resonator cell. In a second part a preliminary result obtained with the Thermoacoustics interface is also presented.
M. A. G. Suijlen , R. J. Woltjer ,
 Novioscan, Nijmegen, Netherlands
For non-imaging wearable ultrasound applications Novioscan is developing piezoelectric MEMS transducers. These transducers consist of a large array of micromechanical silicon membranes with piezoelectrically actuated regions to generate an out-of-plane displacement causing a pressure wave in the adjacent medium. For a typical application of echo sounding in a human body such transducers operate ...
Massachusetts Institute of Technology: Lincoln Laboratory, Lexington, MA, USA
In this numerical study, surface acoustic waves (SAWs) are evaluated as a potential disruptive flow technology for enhancing heat transfer in microchannels. Using COMSOL Multiphysics® software, the physics governing acoustics, single-phase-fluid flow and heat transfer are coupled. The results show that acoustic streaming can disrupt the bulk fluid flow, creating rotating vortices within the ...
H. Lin , N. Sun , N. X. Sun ,
 W.M. Keck Laboratory for Integrated Ferroics, ECE Department, Northeastern University, Boston, MA, USA
RF NEMS Magnetoelectric (ME) Sensor with a ferromagnetic (FeGaB)/ piezoelectric (AlN) thin film heterostructure is simulated, fabricated and measured in this work. To analyze the response of the ME structures, the coupling between the magnetic, elastic and electric field in the two different magnetostrictive and piezoelectric effects should be taken into consideration. Simulations with FEM ...
A. Gunderson , B. Simon , A. Bonomo , M. Isakson ,
 Applied Research Laboratories, University of Texas - Austin, Austin, TX, USA
Finite element models for acoustic scattering from three dimensional underwater elastic objects, calculated in the frequency domain, are transformed to the time domain through Fourier synthesis using COMSOL Multiphysics®. The time domain mirrors the way in which experimental scattering data from real targets is acquired. Fluid elements are modeled using built-in physics in COMSOL’s acoustics ...
Clemson University, Clemson, SC, USA
Surface acoustic wave (SAW) devices are commonly used as wireless filters, resonators, and sensors. The confinement of acoustic energy near the surface of a piezoelectric substrate in a SAW sensor makes it highly sensitive for discerning surface perturbation. As sensors, SAW devices have the potential to provide a high-performance sensing platform with capabilities of remote and high-temperature ...
Surface Acoustic Wave Scattering Matrix Evaluation Using COMSOL Multiphysics®: Application to Surface Acoustic Wave Transmission Through 2D Surface Phononic Crystal
S. Yankin[1,2], A. Talbi, V. Preobrazhensky[1,3], P. Pernod, O. Bou Matar, A. Pavlova
 Joint International Laboratory LICS/LEMAC, IEMN UMR CNRS 8520, EC Lille, Villeneuve d'Ascq, France
 Saratov State University, Saratov, Russia
 Wave Research Center, Russian Academy of Sciences, Moscow, Russia
This contribution is dedicated to numerical analysis of SAW propagation though 2D surface phononic crystal (PnC) and FE method is nowadays one of most common tool for such calculation. The device under investigation consists of two dispersive IDT and lattice of ferromagnetic pillars realized on 128°YX LiNbO3. In addition to dispersion curves calculations this work describes the results of ...
R. Langkemper , R. Külls , J. Wilde , S. Nau , S. Schopferer ,
 Fraunhofer-Institut für Kurzzeitdynamik, Ernst-Mach-Institut, EMI, Freiburg, Germany
 Albert-Ludwigs-Universität Freiburg, Institut für Mikrosystemtechnik, Freiburg, Germany
Acceleration is an important quantity to be measured in high-speed dynamics. A new piezoresistive sensor for the measurement of high-amplitude, short-duration transient accelerations of up to 100,000 g has been developed at the Fraunhofer EMI. Its figure of merit (sensitivity x resonance frequency²) is about one order of magnitude higher than that of comparable state-of-the-art sensors. ...