T. Kaya, B. Shiari, K. Petsch, and D. Yates
Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI
In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...
H.T.D. Grigg, T.H. Hanley, B.J. Gallacher
Newcastle University, Newcastle upon Tyne, United Kingdom
This work is concerned with systems possessing cyclic symmetries. In particular, we concentrate on the case in which the medium possesses infinite order cyclic symmetry, while the constitutive relations have cyclic symmetry of a lower order. We investigate the interactions between modes with cyclic symmetry of order n and geometries with underlying cyclic symmetry of order M. Rayleigh's ...
A. K. Reddy, T. Satyanarayana
Lakireddy Balireddy Autonomous College of Engineering, Mylavaram, A.P., India
The present work reports the fabrication process of micro lens for pinhole cameras, modeled using COMSOL Multiphysics®, by satisfying the wetting properties. Wetting is a change in contact angle between the liquid and solid surface area. The wetting properties are clearly understood in terms of forces. The two immiscible fluids were taken for the formation of fluid-fluid and wall-fluid ...
Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications
A. Arevalo, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia
The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...
Rachita Shettar, Dr. B G. Sheparamatti
Basaveshwar Engineering College, Bagalkot, Karanataka, India
In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...
Visvesvaraya National Institute of Technology
Vibrating mechanical tank components, such as quartz crystals and surface acoustic wave (SAW) resonators with Q’s in the range of 10e3–10e6, are widely used to implement high-Q oscillators and band pass filters in the radio frequency (RF) and intermediate frequency (IF) stages of communication transceivers. This paper will discuss designing of resonator and effects of various parameter on the ...
N. Bhalla, S. Li, and D. Chung
Chung Yuan Christian University, Taiwan, (R.O.C)
National Tsing Hua University, Taiwan, (R.O.C)
Different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends ...
A. K. Namdeo , H. B. Nemade ,
 Department of Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Guwahati, Assam, India
The paper presents a method of extraction of electrical equivalent circuit of a one port surface acoustic wave (SAW) resonator from the results of simulation based on finite element method (FEM) using COMSOL Multiphysics software. A one port SAW resonator consists of large number of periodic interdigital transducer (IDT) electrodes fabricated on the surface of a piezoelectric substrate. A ...
U. Vogel , M. Spindler , S. Wege , T. Gemming 
 Leibniz Institute for Solid State and Materials, Dresden, Germany
In this work, we seek to simulate SAWs for a better understanding and to benchmark the currently available cloud computing possibilities of COMSOL Multiphysics® software. By using the MEMS module we demonstrate 3D models with reduced geometry to achieve principle information about the wavefield. For a benchmark, a high-speed workstation with limited memory (RAM) is compared to the most potent ...
N. Gouthami, D. Parthiban, M. Alagappan, and G. Anju
PSG College of Technology
Tamil Nadu, India
The objective of this paper is to design a 3D Gas Sensor for sensing Hydrogen gas and to increase the conductivity at nano level. In this novel design, nanorods act as the sensing layer. The sensitivity towards gas adsorption is found to be increased due to its high surface to volume ratio. The total displacement and voltage on intermediate layer after gas adsorption will be changing by varying ...