技術情報とプレゼンテーション

A new design concept for large (6 mm diameter) dynamically focusing silicon membrane mirrors using electrostatic actuation was realized. With this concept membrane buckling by residual compressive stress inside the membrane can be avoided. To eliminate the influence of residual stress ... 詳細を見る

The most commonly used type of resonator is the AT-cut, where the quartz blank is in the form of a thin plate cut at an angle to the optic axis of the crystal. This paper reports the modeling of a quartz oscillator for a resonant frequency analysis based on piezoelectric effects. The ... 詳細を見る

Microfluidic devices and lab-on-a-chip (LOC) require the ability to transport or pump reagents or reaction products, the ability to effectively mix small volumes of fluid, and provide direct data display. Surface acoustic wave (SAW) driven acoustic streaming generated by a piezoelectric ... 詳細を見る

Finite element analysis (FEA) is a modern tool for exploration of new horizons in science, technology and engineering. Different computer software such as ANSYS, ABACUS, PZFLEX and COMSOL Multiphysics® based on FEA are used for modeling and simulation of acoustic phenomena, for design of ... 詳細を見る

As a part of a lab-on-chip-device, more often it is required to measure dielectric constant of the fluid. For this purpose it is necessary to develop a sensor whose size is compatible with microfluidic channel. The work, presented in this paper, studies effect of the parameters ... 詳細を見る

Piezoresistive pressure sensors have received much attention over the years because of low cost, simple measurement techniques, etc. There is a challenge in design with respect to appropriate positioning, shape and temperature compensation. Different models of piezoresistive pressure ... 詳細を見る

We present an optimized and efficient design of an electrohydrodynamic (EHD) micropump for high performance in microscale and biological applications. We are targeting two major applications, a parylene C design for electrically-actuated medicine delivery, and a silicon-based pump design ... 詳細を見る

Anchor loss causes a reduction in the quality factor of high frequency micromechanical resonators. This study illustrates the importance of anchor design in mitigating anchor loss in high frequency resonators. The performances of two different anchor configurations for a silicon nitride ... 詳細を見る

Radio Frequency MEMS devices have emerged to overcome the problem of high losses associated with semiconductors at high frequencies. A tunable MEMS capacitor is a micrometre-scale electronic device whose capacitance is controlled through different actuation mechanisms which govern the ... 詳細を見る

The present work reports the fabrication process of micro lens for pinhole cameras, modeled using COMSOL Multiphysics®, by satisfying the wetting properties. Wetting is a change in contact angle between the liquid and solid surface area. The wetting properties are clearly understood in ... 詳細を見る