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COMSOL Conference 2026 論文集を見る

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MEMS and Nanotechnology

A Methodology For The Simulation Of MEMS Spiral Inductances Used As Magnetic Sensors

S. Druart, D. Flandre, and L.A. Francis
Université catholique de Louvain - ICTEAM, Louvain-la-Neuve, Belgium

In this paper, a methodology to simulate the electric behavior of spiral inductances is presented and discussed. All the methodology is built with the COMSOL software used with the Matlab scripting interface and then allows performing fully parameterized simulations. The program ... 詳細を見る

Thermally Induced-Noise Reduction Using an Electrostatic Force Feedback

H. Lee, and J.V. Clark
Purdue University, West Lafayette, IN, USA

In this paper we present a method to mitigate the effect of thermally-induced noise in Micro-Electro-Mechanical Systems (MEMS) through a force feedback circuit. Inherent noise-induced vibrations, which would be inconsiderable in macro scale, are considered as a limitation in micro- and ... 詳細を見る

The 3D Mixed-Dimensional Quench Model of a High Aspect Ratio High Temperature Superconducting Coated Conductor Tape

W.K. Chan[1,2], J. Schwartz[2], P. Masson[3], and C. Luongo[4]
[1]FAMU-FSU College of Engineering, Tallahassee, FL, USA
[2]North Carolina State University, Raleigh, NC, USA
[3]Advanced Magnet Lab, Palm Bay, FL, USA
[4]ITER Organization/Magnet Division, Saint Paul-lez-Durance, France

A successful development of an effective quench detection and protection method for a high temperature superconducting (HTS) coil based on a HTS coated conductor tape lays on a thorough understanding of its slowly propagating, three-dimension (3D) quench behavior. Toward this goal, a 3D ... 詳細を見る

Design and Optimization of an All Optically Driven Phase Correction MEMS Deformable Mirror Device using Finite Element Analysis

V. Mathur[1], K. Anglin[1], V.S. Prasher[1], K. Termkoa[1], S.R. Vangala[1], X. Qian[1], J. Sherwood[1], W.D. Goodhue[1], B. Haji-Saeed[2], and J. Khoury[2]

[1]Photonics Center, University of Massachusetts-Lowell, Lowell, Massachusetts, USA
[2]Air Force Research Laboratory/Sensors Directorate, Hanscom Air Force Base, Massachusetts, USA

Optically addressable MEMS mirrors are required for future high density adaptive optics array systems. We have demonstrated a novel technique of achieving this by actuating low stress Silicon Nitride micro mirrors via cascaded wafer bonded Gallium Arsenide photo detectors on Gallium ... 詳細を見る

Optimization of Carbon Nanotube Field Emission Arrays

B. L. Crossley[1], M. Kossler[1], P.J. Collins[1], R. A. Coutu Jr.[1], and L. A. Starman[1]

[1]Air Force Institute of Technology, Wright-Patterson AFB, Ohio, USA

Carbon nanotubes (CNTs) have been proven experimentally to be well suited for field emission applications. An optimized triode configured CNT field emission array is developed using the COMSOL Multiphysics Electrostatics Application to adjust five key physical dimensions to investigate ... 詳細を見る

The Fabrication of a New Actuator Based on the Flexoelectric Effect

S. Baskaran[1], S. Thiruvannamalai[1], N. Ramachandran[1], F.M. Sebastian[1], and J.Y. Fu[1]
[1]State University of New York at Buffalo, Buffalo, New York, USA

This paper presents a novel methodology towards the design, analysis, and the fabrication process involved in developing a cost effective method to create a piezoelectric actuator by means of the flexoelectric effect. The basic physical equations of the flexoelectric effect and the ... 詳細を見る

Multiphysics Simulation of the Effect of Sensing and Spacer Layers on SAW Velocity

P. Zheng[1,4], D.W. Greve[2,4], and I.J. Oppenheim[3,4]

[1]Department of Physics, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA
[2]Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA
[3]Department of Civil and Environmental Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA
[4]National Energy Technology Laboratory, Pittsburgh, Pennsylvania, USA

Surface acoustic wave gas sensors use a chemically sensitive resistive layer to detect gas concentration. The resistivity of the sensing material, the sensing layer thickness, and the spacer layer thickness all affect the surface wave propagation velocity. Existing analytic theory ... 詳細を見る

The Origin of Mass-change Sensitivity within Multi-layered, Non-uniform, Piezoelectrically-actuated Millimeter-sized Cantilever (PEMC) Biosensors: Vibrational Analysis through Experiment and Finite Element Modeling (FEM)

B.N. Johnson[1], and R. Mutharasan[1]

[1]Department of Chemical and Biological Engineering, Drexel University, Philadelphia, Pennsylvania, USA

A 3D finite element model (FEM) of the PEMC sensor was developed to characterize the modes of vibration that have demonstrated high sensitivity to mass-change in experimentally fabricated sensors. The fundamental bending mode of vibration and the 1st bending harmonic are predicted at 10 ... 詳細を見る

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