研究開発におけるマルチフィジックスシミュレーションの具体例
さまざまな業界のエンジニア, 研究者, 科学者がマルチフィジックスシミュレーションを使用して革新的な製品の設計とプロセスを研究および開発しています. COMSOL カンファレンスで発表したテクニカルペーパーやプレゼンテーションからインスピレーションを得てください. 以下の選択項目を参照するか, クイック検索ツールを使用して特定のプレゼンテーションを検索するか, アプリケーション領域でフィルタリングします.
COMSOL Conference 2024 論文集を見る
在干法刻蚀工艺中，刻蚀腔室内部可能存在带电尘埃颗粒，研究带电微粒在等离子体中的行为，以及带电微粒对等离子体的影响具有一定的实用价值。本研究引入层流、等离子体时间周期和流体流动颗粒追踪物理场，研究得出带负电的尘埃颗粒在RF等离子体中被限制在RF电极上方的等离子体鞘层区域，这与J. Beckers et.al研究的一致。 詳細を見る
Small-scale plasma jets in atmospheric air can produce regions of highly reactive chemistry coincident with temperatures approaching room temperature allowing his type of cold plasma jet to be used for decontamination of surfaces and sterilization of living tissue. In the device under ... 詳細を見る
Particle In Cell (PIC) simulation tool for the simulation of 2.45GHz ECR ion source was developed tanks to Comsol Multiphysics RF module capability to compute electromagnetic field propagation imposing a tensorial permittivity with real and complex parts. A tensorial description is ... 詳細を見る
Process Hardware for heating, etching and plasma deposition in vacuum processes on Silicon wafers or glass substrates face challenging requirements due to very shallow and extended structures. Molecular Flow calculations are used to evaluate staggered shields with the aim to protect ... 詳細を見る
1.Introduction Transparent conductive oxides (TCOs) operating near their epsilon-near-zero (ENZ) point have recently been shown to exhibit strong and ultrafast intraband optical absorption processes, whose excitation results in a variation of the effective mass and electrical conductance ... 詳細を見る
Microwave discharges have a wide range of applications, such as gas conversion, material processing and surface treatment; also they can provide an efficient way for dissociation of molecular gases as CO2 and N2O. Depending on the operating pressure and temperature, non-equilibrium ... 詳細を見る
High power Lower-Hybrid RF waves injected at in a Tokamak plasma can strongly modify the edge plasma. This is caused by ponderomotive forces pushing charged particles in an inhomogeneous oscillating electromagnetic field towards weaker field areas. On the Alcator C-Mod Tokamak, edge ... 詳細を見る
Standard approaches to reproduce the coupling of wave propagation and plasma transport inside a helicon plasma source rely on electromagnetic simulations coupled to either kinetic or particle-in-cell strategies to reproduce the plasma response. If the plasma density reach values higher ... 詳細を見る
Electrohydrodynamic (EHD) drying is a cutting-edge, non-thermal drying technique that leverages high electric field to enhance water removal from moist materials via corona wind generation. EHD drying encompasses two fundamental phenomena: corona wind generation and the drying process ... 詳細を見る
The radio-frequency(RF) plasma sources have shown great potential in various industrial applications such as thin coatings deposition and polymers modification[1,2]. Physics of low pressure RF plasmas has been investigated significantly[3]; however, this kind of plasma source is rarely ... 詳細を見る