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FEM simulation can be used to obtain a SAW velocity and some related parameters (squared electromechanical coupling coefficient, reflectivity, etc.) for different typical configurations. Such parameters are input data for various analytical and semi-analytical methods of SAW device ... 詳細を見る

Uncertainty quantification is used to study the effect of manufacturing variation on the performance of a 2D solidly mounted resonator (2D SMR). This tutorial shows how the resonant frequency is affected by thickness variations of the piezoelectric layer and the Bragg reflector layers. ... 詳細を見る

AT cut quartz crystals are widely employed in a range of applications, from oscillators to microbalances. One of the important properties of the AT cut is that the resonant frequency of the crystal is temperature independent to first order. This is desirable in both mass sensing and ... 詳細を見る

ソリッドマウント共振器 (SMR) は, 厚い基板上に堆積された音響ミラースタック上に形成された圧電 MEMS 共振器です. このチュートリアルでは, SMR の2Dシミュレーション方法を説明します. この例では, 固有モードを計算し, 500 MHz から 1200 MHz までの周波数応答を解析しました. 計算されたインピーダンス曲線と変位プロファイルは, 文献に記載されているシミュレーション結果とほぼ一致しています. 詳細を見る

A model built with the RF Module can be connected to an electrical circuit equivalent, if there is some structure outside of the model space that you wish to approximate as a circuit equivalent. In this model, the 3D model of a coaxial cable is connected to a voltage source, in series ... 詳細を見る

Inductive devices experience capacitative coupling between conductors at high frequencies. Modeling this phenomenon requires that you describe electric fields that have components both parallel with and perpendicular to the wire. This consideration might lead to the conclusion that a 3D ... 詳細を見る

This model shows how to compute the S-parameter for a piezoelectric MEMS device by extending the tutorial Thin-Film BAW Composite Resonator. The measurement of S-parameter is commonly used to characterize such devices for RF applications. The terminal feature in the Electrostatics ... 詳細を見る

This tutorial model solves for an inductively coupled plasma reactor with RF bias (also known as ICP/CCP reactors) in a mixture of argon/chlorine. The model computes the fluid flow and gas heating. Important aspects and strategies for modeling electronegative discharges are discussed. 詳細を見る

A tapered slot antenna, also known as a Vivaldi antenna, is useful for wide band applications. Here, an exponential function is used for the taper profile. The objective of this model is to compute the far-field pattern and to compute the impedance of the structure. Good matching is ... 詳細を見る

This example shows how to set up a piezoelectric transducer problem following the work of Y. Kagawa and T. Yamabuchi. The composite piezoelectric ultrasonic transducer has a cylindrical geometry that consists of a piezoceramic layer, two aluminum layers, and two adhesive layers. The ... 詳細を見る