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MEMS Modulex

Simulation of RF Tissue Ablation

This example exemplifies how to model tissue ablation through applying RF radiation. A more detailed description of the phenomenon, and the modeling process, can be seen in the blog post "Study Radiofrequency Tissue Ablation Using Simulation". 詳細を見る

Zernike Polynomial Fitting of a Deformed Surface

This tutorial shows how the displacement field of a deformed surface can be fit to a Zernike polynomial basis. The method of linear least-squares fitting is made significantly easier when fitting to an orthonormal basis, such as the Zernike polynomials on a circle. The displacement ... 詳細を見る

Squeeze-Film Gas Damping of a Vibrating Disc

This benchmark model computes the total force acting on a vibrating disc in the frequency and time domains and compares both results with expressions derived analytically. When the vibration amplitude is small enough that the system is linear the frequency and time domain results agree ... 詳細を見る

Thin-Film BAW Resonator with Equivalent Circuit

This tutorial demonstrates how an electrical circuit model of a MEMS resonator can be derived using the Parameter Estimation feature. The model is a modified Butterworth-Van Dyke circuit created using the Electrical Circuit interface and represents a Thin-Film Bulk Acoustic Resonator ... 詳細を見る

Squeeze-Film Damping of Perforated Plates

This benchmark model compares the damping coefficients of perforated plates from computation results versus experimental data. The simulation includes 18 different geometric configurations. It uses the Bao's perforation model, which is built-in in the Thin Film Flow physics interface. ... 詳細を見る

Aluminum Nitride Lamb Wave Resonator — 3D

Lamb wave resonators are useful components for many radio-frequency applications. This tutorial shows how you model an aluminum nitride lamb wave resonator and perform eigenfrequency and frequency-response analyses to characterize the device. 詳細を見る

Gecko Foot

In nature, geckos use dry adhesion forces to climb walls. They have inspired researchers to develop synthetic gecko foot hairs to be used in, for example, robot applications. This model contains the nano/micro hierarchy of a synthetic gecko foot hair, where cantilever beams both in nano ... 詳細を見る

Solidly Mounted Resonator 3D

A solidly-mounted resonator (SMR) is a piezoelectric MEMS resonator formed on top of an acoustic mirror stack deposited on a thick substrate. This tutorial shows how to simulate an SMR in 3D. In this example, the eigenmodes were computed with varying number of particles attached to the ... 詳細を見る

Applying a Current-Voltage Switch to Models

This example exemplifies how to model the switching between current and voltage excitations in Terminal boundary conditions. A more detailed description of the phenomenon and the modeling process can be seen in the blog post "Control Current and Voltage Sources with the AC/DC Module". 詳細を見る

Pull-In and Pull-Out Analysis of a Biased Resonator — 2D

An electrostatically actuated MEMS resonator is simulated. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. In this example, the pull-in and pull-out voltages of the resonator are computed. This is done via a quasi-static analysis of the ... 詳細を見る