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MEMS Modulex

Capacitive Micromachined Ultrasonic Transducer with Lumped Model

This tutorial demonstrates how a lumped model of a MEMS transducer can be derived from its FEM model. It includes an FEM model of a capacitive micromachined ultrasonic transducer (CMUT) and the corresponding lumped model created using the Lumped Mechanical System (LMS) interface. The ... 詳細を見る

Lecture Series Files: Joule Heating and Thermal Expansion

These model and geometry files were used during a lecture series on Joule heating and thermal expansion. Get an overview in the accompanying blog post Video Lecture Series: Modeling Joule Heating with Thermal Expansion. 詳細を見る

Manufacturing Variation Effects in a Micromachined Comb-Drive Tuning Fork Rate Gyroscope

This tutorial example is kindly provided by Dr. James Ransley at Veryst Engineering, LLC. This model continues from the base model “A Micromachined Comb-Drive Tuning Fork Rate Gyroscope”, which is also provided by Dr. Ransley. The model demonstrates how to accurately compute the effects ... 詳細を見る

Lithium Diffusion and Plastic Deformation in a Double-Walled Nanotube Electrode

This example shows how to model Lithium diffusion in a silicon electrode that swells. The model shows how swelling-induced plastic deformation can increase the maximum state of charge (SOC). 詳細を見る

Squeeze-Film Gas Damping in an Accelerometer

Squeezed-film gas damping is a critical aspect of many MEMS transducers and actuators. In accelerometers, for example, inertia produces a motion that the device detects. A typical structure connects a large proof mass to surrounding structures with elastic beams, which forms a mechanical ... 詳細を見る

Normal Modes of a Biased Resonator — 3D Geometry from a GDS-File

This tutorial demonstrates how to build the geometry for the 3D biased resonator from GDS file using the ECAD Import Module and the Design Module. The procedure emulates semiconductor and MEMS fabrication processes to build 3D geometry more efficiently and is more intuitive for those ... 詳細を見る

Trimmer Capacitor

A trimmer capacitor has a variable capacitance. One way of obtaining this is to use parallel facing electrodes with a variable overlap area. In this example, the capacitance can be changed by turning one electrode using a screwdriver. Typically a linear angular response is desired. ... 詳細を見る

Solidly Mounted Resonator 2D with Uncertainty Quantification

Uncertainty Quantification is used to study the effect of manufacturing variation on the performance of 2D Solidly Mounted Resonator (2D SMR). This tutorial shows how resonant frequency is effected by thickness variations of the piezoelectric layer and the Bragg reflector layers. The ... 詳細を見る

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