K. Kavitha, Y. R. Manjoosha, C. S. Sukanya, K. Saranya, K. Chandra Devi, M. Alagappan, A. Gupta
Department of Biomedical Engineering, PSG college of technology, Coimbatore, TamilNadu, India
The biological hair-cell is a modular building block of a rich variety of biological sensors. These sensors are responsive to various mechanical properties like vibration, touch, gravitational forces, etc., especially flow. Using micro and nano-fabrication technology, an engineering equivalent of such sensors have been reported to be fabricated, imitating the structure and transfer function of ...
Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics
M. Guvench, and J. Crosby
University of Southern Maine, Gorham, Maine, USA
In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...
N. Bhalla, S. Li, and D. Chung
Chung Yuan Christian University, Chungli,Taiwan
National Tsing Hua University, Hsinchu, Taiwan
Investigation in this paper aims at performing Mechanical Stress Strain analysis, Thermal, Piezoresistive and Piezoeletric analysis of Silicon Structures using COMSOL. The simulation results have been cross checked by mathematical calculation.
S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending. The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the ...
In recent years, optical manipulation using optical radiation pressure has been widely studied. In this study, the radiation pressure exerted on various kinds of microscopic objects with different laser beams was evaluated by COMSOL Multiphysics software. By changing beam shapes, microscopic objects can be trapped and rotated. This paper is in Japanese.
C. Tonry, M. K. Patel, C. Bailey, M. P.Y. Desmuliez, W. Yu
Computational Mechanics and Reliability Group (CMRG), School of Computing and Mathematical Sciences, University of Greenwich, London, United Kingdom
Microsystems Engineering Centre (MISCEC, School of Engineering & Physical Sciences, Heriot Watt University, Earl Mountbatten Building, Edinburgh, United Kingdom
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, China
Electric Field Assisted Capillarity (EFAC) is a novel technique for the fabrication of hollow polymer microstructures. It has advantages over current methods as it is a single step process. Hollow microstructures have many uses in industry from microchannels and microcapsules in BioMEMS to fibre-optical waveguides. It makes use of the dielectric properties of polymers combined with a heavily ...
M. Baù, V. Ferrari, and D. Marioli
Department of Electronics for Automation, University of Brescia, Brescia, Italy
A contactless electromagnetic principle for the excitation of mechanical vibrations in resonant structures has been investigated. The principle relies on no specific magnetic property of the resonator except electrical conductivity and can be adopted for employing the structures as resonant sensors for measurements either in environments not compliant with the requirements of active electronics ...
F. Bircher and P. Marmet
Institute of Print Technology, Bern University of Applied Sciences, Burgdorf, Switzerland
Electromagnetic micro valves are currently developed empirically or the different physics are treated separately. To accelerate the development-process and for a better understanding of the overall system, a multiphysics simulation is built up. This simulation considers the electromagnetics, the electronics (including the control of the process), the mechanics and the fluidics with respect to the ...
Design and Development of Microsystems within a Corporate Research Environment by Utilizing Comsol Multiphysics
Corporate Research & Technologies
Alexander Frey received his M.A. degree from the University of Texas, Austin, in 1994, the Dipl. Phys. degree from the University of Wuerzburg, Germany in 1997 and the PhD from the Saarland University, Germany in 2010. In 1997 he joined Research Laboratories of Siemens working on the design of DRAM sensing circuits. In 1999 he joined Corporate Research, Infineon, Munich, Germany. He was engaged ...
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...