H. J. Hall , L. A. Starman ,
 Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA
Beam steering and adaptive optics micromirror applications commonly demand optically flat surfaces with minimal mass. When reflective coatings (usually metallic Au or Al) are applied to micromirror surfaces in order to meet optical reflectivity requirements the resulting film stress (usually tensile) can be substantial. The mass of the mirror can be a limiting factor in the dynamic performance. ...
M. A. Shah , F. Iqbal , B. L. Lee ,
 Korea University of Technology and Education, Cheonan, Chungcheong, South Korea
A dual axis MEMS seismometer targeted for building monitoring system has been simulated for a full scale of ±5g acceleration. The design uses the capacitive effect for vibration sensing. This comb drive capacitive MEMS seismometer consists of 8 springs with two proof masses. The device is very low cross axis sensitive (almost negligible cross axis error). The cross axis sensitivity of x-axis is ...
Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening - new
A. Ivanov , U. Mescheder ,
 Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...
Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM) - new
B. Park , T. Chen , C. Shafai ,
 Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada
This poster presents the design and analysis of a novel horseshoe shaped MEMS actuator for adaptive optics. The actuation mechanism is Lorentz force enabling low current (below 10 mA) operation. The actuator combined with an overlying aluminum coated SU-8 soft polymer membrane for the mirror, together form the complete adaptive optics system to enable correction of wavefront distortion of ...
A. El Kacimi , E. Pauliac-Vaujour , J. Eymery 
 University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
 University Grenoble Alpes, CEA, Grenoble, France
We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a capacitive structure. The device characteristics directly depend on growth conditions for example by tuning ...
Calculation of Surface Acoustic Waves on a Piezoelectric Substrate using Amazon™ Cloud Computing - new
U. Vogel , M. Spindler , S. Wege , T. Gemming 
 Leibniz Institute for Solid State and Materials, Dresden, Germany
In this work, we seek to simulate SAWs for a better understanding and to benchmark the currently available cloud computing possibilities of COMSOL Multiphysics® software. By using the MEMS module we demonstrate 3D models with reduced geometry to achieve principle information about the wavefield. For a benchmark, a high-speed workstation with limited memory (RAM) is compared to the most potent ...
A. Arevalo , J. P. Rojas , D. Conchouso , M. M. Hussain , I. G. Foulds 
 Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Okanagan Campus, Canada
Energy efficiency and harvest, speed and performance, flexibility and portability are key elements for innovation in the current consumer electronics markets. Thermoelectric Generators can convert energy from heat gradients into electricity. Every source of heat from an electronics device can potentially be used as a source of energy. This generators have the advantage of: being silent, compact, ...
M. I. Hassan , A. Brimmo , A. N. Chatterjee ,
 Masdar Institute of Science and Technology, Abu Dhabi, UAE
 MEMS Department, GLOBALFOUNDRIES, Singapore, Singapore
The multilayer composite single mass cantilever is a MEMS energy harvester structure. The vibrating structure is under vacuum in hermetic MEMS. However, out-gassing during process integration and fabrication would cause air molecules (e.g. hydrogen, nitrogen, argon, water vapor, oxygen, ammonia, nitrous oxide, carbon dioxide, carbon monoxide, etc.) to be present in the cavity, and therefore vary ...
Evaluation of Efficiency Factors of Commercial Thermoelectric Materials Using COMSOL Multiphysics® Software - new
K. Cadien , S. Seif , T. Thundat ,
 Department of Chemical & Materials Engineering, University of Alberta, Edmonton, AB, Canada
We have developed single leg model using COMSOL Multiphysics® software to compute Φ of TE materials without using conventional ZT parameters. The Φ were calculated using parametric programming in PDE by using special probe to capture change in power (∆P), ΔT, and area (A), thus (Φ = ∆P/A*ΔT 2). The obtained results showed that the TE material with highest Φ when the temperatures are between 375 ...
C. R. Pérez , J. J. Santiago-Avilés ,
 Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, PA, USA
 Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA
Sensorineural hearing loss is the most common sensory deficit in the world, and within this category damage or loss of the primary sensory cells of the inner ear, known as hair cells is the most common cause . Partial hearing loss is addressed by the use of hearing aids, electronic devices that greatly amplify sound directly into the user's ear, but for more severe cases cochlear implants are ...