Huazhong University of Science and Technology, Wuhan, China
High magnetic field research has yielded fruitful results. Since 1913, associated with the magnetic field there are 19 Nobel Prizes, including a prize for medicine, five chemistry prizes, and 13 physics prizes. In recent years, the international community under the conditions of strong magnetic field is very active in scientific research, involving many disciplines such as physics, chemistry, ...
A Study of the Effects of Mounting Supports, and Dissipation on a Piezoelectric Quartz Double-Ended Tuning Fork Gyroscope
G. Choi, Y. Yong
Rutgers University, New Brunswick, NJ, USA
A COMSOL model of a piezoelectric quartz double ended tuning fork gyroscope was implemented. The gyroscope has two detection modes; the first mode detects the angular velocity about a z-axis perpendicular to the tuning fork plane (x-y plane), while the second mode detects the angular velocity about a y-axis that is the longitudinal axis along the length of the tuning fork. Eigenfrequency ...
H. J. Hall , L. A. Starman ,
 Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA
Beam steering and adaptive optics micromirror applications commonly demand optically flat surfaces with minimal mass. When reflective coatings (usually metallic Au or Al) are applied to micromirror surfaces in order to meet optical reflectivity requirements the resulting film stress (usually tensile) can be substantial. The mass of the mirror can be a limiting factor in the dynamic performance. ...
Design and Optimization of an All Optically Driven Phase Correction MEMS Deformable Mirror Device using Finite Element Analysis
V. Mathur, K. Anglin, V.S. Prasher, K. Termkoa, S.R. Vangala, X. Qian, J. Sherwood, W.D. Goodhue, B. Haji-Saeed, and J. Khoury
Photonics Center, University of Massachusetts-Lowell, Lowell, Massachusetts, USA
Air Force Research Laboratory/Sensors Directorate, Hanscom Air Force Base, Massachusetts, USA
Optically addressable MEMS mirrors are required for future high density adaptive optics array systems. We have demonstrated a novel technique of achieving this by actuating low stress Silicon Nitride micro mirrors via cascaded wafer bonded Gallium Arsenide photo detectors on Gallium Phosphide. In the work reported here, we discuss the key design parameters of the device, and present the finite ...
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...
BITS Pilani K K BIRLA GOA CAMPUS
The actuator comprises of a temperature sensitive composite deflecting beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes an expansion in the composite beam thereby causing it to deflect. The deflecting beam impinges on the piezoelectric crystal and generating voltage. Response curves for the deflection versus temperature for temperature ranges ...
S. Burgarella, B. Dell’Anna, V. Perna, G. Zarola, and S. Merlo
STMicroelectronics, Agrate Brianza, MI, Italy
Dipartimento di Elettronica, Università degli Studi di Pavia, Pavia, Italy
Dielectrophoresis (DEP) is a method for cell manipulation without physical contact in lab-on-chip devices, since it exploits the dielectric properties of cells suspended in a microfluidic sample, under the action of locally generated high-gradient electric fields. The DEP platform that has been developed offers an integrated solution for customizable applications. Several functional units, ...
W. J. Wu
NTU Nano-Bio MEMS Group
National Taiwan University,
This presentation presented the following: * The building of an FEA model of an electric cell actuator using COMSOL Multiphysics * Validation of this model through the AVID and ESPI measurement systems * The building of an FEA model of an electric loudspeaker using COMSOL Multiphysics * Validation of this model throughan acoustic measurement systems This paper is in Chinese.
3D Stationary and Temporal Electro-Thermal Simulations of Metal Oxide Gas Sensor Based on a High Temperature and Low Power Consumption Micro-Heater Structure
N. Dufour, C. Wartelle, P. Menini
LAAS-CNRS, Toulouse, France
Renault, Guyancourt, France
The aim of this work was to simulate the electro-thermal behavior of a micro-hotplate used as a gas sensor, in order to compare the obtained results with a real structure. The structure has been designed in 3D and a stationary and a temporal study has been realized.
Design of a MEMS Resonator for a Centre Frequency Greater than 26.35 MHz and Temperature Coefficient Frequency Less than 0.5 ppm
S.Manikandan, R.Radeep krishna
Kalasalingam University, Department of ECE, Srivilliputtur ,Krishnan koil, Tamil Nadu, India
The variability of the design parameters caused by material properties like thermal conductivity is the major challenge in Micro Electromechanical System (MEMS). In resonator design the basic problem is that the frequency changes with temperature variation and quantitative explanation with respect to this varies. The change can be attributed to the stability in terms of frequency drift in parts ...