アプリケーションギャラリ

Capacitively coupled RF discharges can operate in two distinct regimes depending on the discharge power. In the low power regime, known as the alpha regime, the electric field oscillation is responsible to heat and create electrons. In the high power regime, known as gamma regime, the discharge is sustained primarily by electron avalanche within the sheaths initiated by secondary electrons emitted by ion bombarding the electrodes. This model investigates the alpha and gamma regimes and the transition between them in a capacitively coupled RF discharge at atmospheric pressure using the Plasma, Time Periodic interface.