アプリケーションギャラリ

This tutorial drives a capacitively coupled plasma with an L-type matching network at high and low powers. At low power, where the harmonics in the current are low, prefect matching is obtained at the chosen power value. Sweeps over power, frequency, and pressure are performed and their effect on the match power transfer ratio and efficiency are examined. Finally, a sweep is performed over a higher power range. The presence of sizable harmonics in the current causes an impedance mismatch.