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This model demonstrates how to simulate a metasurface beam deflector that uses anomalous refraction. The structure itself is a repeated array of six posts (so-called meta elements). The periodicity of the individual posts is 500 nm, so the full structure of six posts is 3 um wide. The posts are 1 um tall, and the structure is designed to operate at a free space wavelength of 1.55 um.

The cylindrical pillars are Silicon and the substrate is SiO2. The structure is designed so that incident light coming through the substrate at a normal angle of incidence will be refracted at prescribed angle - the anomalous refraction angle.

To model this using COMSOL we apply Periodic Condition boundaries in the x and y directions, combined with Ports of the periodic type in the z direction. The Diffraction Order subnodes on the Ports will fully account for the transmission and reflection into each allowed diffraction direction.