Pulsed Capacitively Coupled Plasma Discharge

Application ID: 67251


This tutorial model shows how to set up a model of a pulsed capacitive discharge. The on pulse consists of 10 periods of excitation at 13.56MHz, followed by no excitation for 100 periods. The I-V characteristics, the electron density, temperature and plasma potential are studied.

この model の例は, 通常次の製品を使用して構築されるこのタイプのアプリケーションを示しています.