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Vibrating Micromirror with Viscous and Thermal Damping

Application ID: 14731

Micromirrors are used in certain MEMS devices to control optic elements. This model of a vibrating micromirror surrounded by air uses the Thermoacoustic-Shell Interaction user interface to model the fluid-solid interaction, and it thus includes the correct viscous and thermal damping of the mirror from the surrounding air. The resonance frequency of the mirror when under a torquing load is studied in the frequency domain by means of both frequency-response and eigenfrequency analyses. A simple RLC model is fitted to the system.

This application was built using the following:


The combination of COMSOL® products required to model your application depends on the physics interfaces that define it. Particular physics interfaces may be common to several products (see the Specification Chart for more details). To determine the right combination of products for your project, you should evaluate all of your needs in light of each product's capabilities, consultation with the COMSOL Sales and Support teams, and the use of an evaluation license.