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MEMS scanning mirrors are a type of MEMS device that realizes optical path control by controlling mirror torsion through a microdriver. The torsion can be single axis or double axis. MEMS scanning mirrors are widely used in laser projection, laser radar, laser processing, and other ... 詳細を見る
Thermoelastic damping, which arises when you subject a material to cyclic stress, is an important factor when designing MEMS resonators. The stress brings about deformation, where materials heat under compressive stress and cool under tensile stress. Thus, due to the resulting heat flux, ... 詳細を見る
Lamb wave resonators are useful components for many radio-frequency applications. This tutorial shows how you model an aluminum nitride Lamb wave resonator and perform eigenfrequency and frequency-response analyses to characterize the device. 詳細を見る
Piezoelectric valves are frequently employed in medical and laboratory applications due to their fast response times and quiet operation. Their energy efficient operation, also dissipates little heat, which is often important for these applications. This model shows how to model a ... 詳細を見る
This tutorial demonstrates the operation of a gyroscope based on design provided by Dr. James Ransley at Veryst Engineering, LLC. The model uses the Electromechanics coupling with the mixed finite element formulation in the Electrostatics interface. 詳細を見る
In the surface acoustic waves industry different crystal cuts of piezoelectric materials are used, e.g. 128ᵒ YX LiNbO3, AT&ST quartz, 42ᵒ YX LiTaO3, etc. Direct data isn’t available for all cuts. The standard approach is to use the so-called Euler angle rotation. COMSOL supports it ... 詳細を見る
A solidly-mounted resonator (SMR) is a piezoelectric MEMS resonator formed on top of an acoustic mirror stack deposited on a thick substrate. This tutorial shows how to simulate an SMR in 3D. In this example, the eigenmodes were computed with varying number of particles attached to the ... 詳細を見る
Thermoelectric coolers are widely used for electronics cooling in various application areas, ranging from consumer products to spacecraft design. The thermoelectric modules are a common application of thermoelectricity in cooling engineering. They consist of several thermoelectric legs ... 詳細を見る
This 2D axisymmetric model demonstrates the operation of a pyroelectric detector found in instruments for measuring laser energy. A disk of lithium niobate (LiNbO3) is sandwiched between two electrodes and connected to an external circuit. The disk is mounted on a ring-shaped ... 詳細を見る
A capacitive micromachined ultrasonic transducer (CMUT) is a micro-scale receiver that converts ultrasound to electrical signal for high-resolution imaging application. This CMUT design has optimized force-displacement characteristics for increased transduction efficiency. Central to the ... 詳細を見る