Application ID: 10185
A scanning electron microscope samples images by scanning a target with a high-energy beam of electrons. The subsequent electron interactions produce signals such as secondary and back-scattered electrons that contain information about the sample surface topography. Electromagnetic lenses are used to focus this electron beam down to a spot about 10 nm wide on the sample surface.
This model requires both the Particle Tracing Module and the AC/DC Module.
This model is included as an example in the following products:AC/DCモジュール 粒子追跡モジュール
however additional products may be needed to reproduce it. This example may be created and run using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the 製品仕様一覧 and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.