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3D ICP Reactor, Argon Chemistry

Application ID: 8661

3D plasma modeling is possible to do in COMSOL. A square coil is placed on top of a dielectric window and is electrically excited at 13.56MHz. A plasma is formed in the chamber beneath the dielectric window, which contains Argon gas at low pressure (20 mtorr). The gas flows into the process chamber from two 2 inch ports and the gas is extracted through a single 4 inch port. The plasma is sustained via electromagnetic induction where power is transferred from the electromagnetic fields to the electrons.