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Pull-in Voltage for a Biased Resonator-2D

Application ID: 11751


Silicon micromechanical resonators have long been used for designing sensors and are now becoming increasingly important as oscillators in the consumer electronics market. In this series of models, a surface micromachined MEMS resonator, designed as part of a micromechanical filter, is analyzed in detail.

The Stationary Analysis of a Biased Resonator model performs a stationary analysis of the resonator, with an applied DC bias. It is used as a basis for all the subsequent analyses, briefly described below.

  • The Frequency Response of a Biased Resonator model performs frequency domain analysis of the structure, which is also biased with its operating DC offset.
  • The Normal Modes of a Biased Resonator model performs a modal analysis on the resonator, with and without an applied DC bias.
  • The Pull-in Voltage for a Biased Resonator model performs a pull-in analysis of the structure, to predict the point at which the biased system becomes unstable.
  • The Transient Response of a Biased Resonator model performs a transient analysis of the response of the structure when a step function is applied to the resonator.

This application was built using the following:

MEMSモジュール

The combination of COMSOL® products required to model your application depends on the physics interfaces that define it. Particular physics interfaces may be common to several products (see the Specification Chart for more details). To determine the right combination of products for your project, you should evaluate all of your needs in light of each product's capabilities, consultation with the COMSOL Sales and Support teams, and the use of an evaluation license.