アプリケーションギャラリには電気, 構造, 音響, 流体, 熱および化学分野に関連する COMSOL Multiphysics® チュートリアルおよびデモアプリファイルが用意されています. これらの例はチュートリアルモデルまたはデモアプリファイルとそれに付随する手順をダウンロードすることにより独自のシミュレーション作業の開始点として使用できます.
クイック検索機能を使用して専門分野に関連するチュートリアルやアプリを検索します. MPHファイルをダウンロードするには, ログインするか, 有効な COMSOL ライセンスに関連付けられている COMSOL Access アカウントを作成します. ここで取り上げた例の多くは COMSOL Multiphysics® ソフトウェアに組み込まれ ファイルメニューから利用できるアプリケーションライブラリからもアクセスできることに注意してください.
The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes. 詳細を見る
This model solves the Boltzmann equation in two-term approximation for a mixture of nitrogen and oxygen representing a background gas of dry air. Electron transport coefficients and source terms are computed by suitable integration of the electron energy distribution function over ... 詳細を見る
This tutorial model demonstrates how to compute the impedance of a capacitively coupled plasma. The Time Periodic study computes the time periodic solution of the plasma. Subsequently, the solution is transformed to the time domain, after which the fast Fourier transform (FFT) solver is ... 詳細を見る
This tutorial model shows how to set up a model of a pulsed capacitive discharge. The on pulse consists of 10 periods of excitation at 13.56MHz, followed by no excitation for 100 periods. The I-V characteristics, the electron density, temperature and plasma potential are studied. 詳細を見る
This tutorial models a DC glow discharge by solving fluid-type plasma equations fully coupled with the homogeneous and time-independent electron Boltzmann equation in the classical two-term approximation. The approximated Boltzmann equation is solved for each position of space and is ... 詳細を見る
This tutorial studies the etching of silicon using an inductively coupled plasma reactor with an RF bias in a mixture of CF4/O2. The etching rate is computed along the wafer as a function of the RF bias voltage. 詳細を見る
Capacitively coupled RF discharges can operate in two distinct regimes depending on the discharge power. In the low power regime, known as the alpha regime, the electric field oscillation is responsible to heat and create electrons. In the high power regime, known as gamma regime, the ... 詳細を見る
Thermoelectric coolers are widely used for electronics cooling in various application areas, ranging from consumer products to spacecraft design. The thermoelectric modules are a common application of thermoelectricity in cooling engineering. They consist of several thermoelectric legs ... 詳細を見る
The Boltzmann equation can be solved to validate sets of electron impact collision cross sections. In fact, sets of collision cross sections are traditionally inferred by solving a two-term approximation to the Boltzmann equation and comparing the results to swarm experiments. This model ... 詳細を見る
Streamers are transient filamentary electric discharges that can develop in a nonconducting background in the presence of an intense electric field. These discharges can attain high electron number density and consequently a high concentration of chemical active species that are relevant ... 詳細を見る
